Ultrasonic nano/microfabrication, handling and driving is an emerging actuation technology, which utilizes ultrasonic vibration and the physical effects of ultrasonic vibration in fluids and solids to implement the fabrication, handling and driving of nano/micro scale objects. This book provides readers with the fundamentals, principles and characteristics of the ultrasonic devices for nano/micro fabrication, handling and driving, and design methods of the devices. Introduces fundamental concepts and offers examples of ultrasonic nano fabrication, including ultrasonic nano rolling, cutting and coating methods Features a wealth of examples to illustrate the ultrasonic concentration and ultrasonic tweezers Explains the principles of ultrasonic driving of gas molecules and demonstrates their applications in high-performance gas sensor systems and metal-air flow batteries Teaches the principles of ultrasonic driving of microfluids and their applications in metal-air flow batteries and cooling of small solid heat sources Provides examples for the finite element method (FEM) modeling and computation of ultrasonic devices for nano/micro fabrication, handling and driving Summarizes the current and future trends in ultrasonic nano/microfabrication, handling, and driving This book shares the advances, methods and applications of ultrasonic micro/nano fabrication techniques for entry-level and advanced readers working on nano/microfabrication, gas sensing, biological sensing, metal-air batteries, electronic component cooling, and other related areas.

Ultrasonic nano/microfabrication, handling and driving is an emerging actuation technology, which utilizes ultrasonic vibration and the physical effects of ultrasonic vibration in fluids and solids to implement the fabrication, handling and driving of nano/micro scale objects. This book provides readers with the fundamentals, principles and characteristics of the ultrasonic devices for nano/micro fabrication, handling and driving, and design methods of the devices. • Introduces fundamental concepts and offers examples of ultrasonic nano fabrication, including ultrasonic nano rolling, cutting and coating methods. • Features a wealth of examples to illustrate the ultrasonic concentration and ultrasonic tweezers. • Explains the principles of ultrasonic driving of gas molecules and demonstrates their applications in high-performance gas sensor systems and metal-air flow batteries. • Teaches the principles of ultrasonic driving of microfluids and their applications in metal-air flow batteries and cooling of small solid heat sources. • Provides examples for the finite element method (FEM) modeling and computation of ultrasonic devices for nano/micro fabrication, handling and driving. • Summarizes the current and future trends in ultrasonic nano/microfabrication, handling, and driving. This book shares the advances, methods and applications of ultrasonic micro/nano fabrication techniques for entry-level and advanced readers working on nano/microfabrication, gas sensing, biological sensing, metal-air batteries, electronic component cooling, and other related areas.

Demands for high-performance micro/nano manipulations, from the manufacture of microelectronic and photonic devices, biomedical apparatus, nanoscience and nanotechnology, renewable energy, environment protection, and high-end appliances, have been rapidly increasing in recent years. However, there are very few books on ultrasonic manipulation technology, which is one of the important means in micro/nano manipulations.This unique title gives the basic physical principles of ultrasonic micro/nano manipulations, and highlights methods of implementing these principles. The nonlinear effects of ultrasound are described in details after piezoelectric transduction and acoustic field are introduced and discussed. Numerous important examples are given in this book, to help readers better understand the applications of these principles and characteristics of ultrasonic manipulators utilizing these principles. The examples cover the manipulations of micro solids, nanoscale entities, droplets and microfluid.This indispensable book will contribute positively to the development and application of micro/nano manipulation technology.

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.