A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon. Aimed at industrial and academic researchers, engineers, developers and manufacturers involved in all areas of optical layer and thin optical film measurement and metrology, process control, real-time monitoring, and applications.

This book presents the proceedings of the 15th EAI International Conference on Automation and Control in Theory and Practice (ARTEP 2023), held in Stará Lesná, Slovakia, February 8-10, 2023. The aim of the conference was to meet the experts in the field of control, industrial automation and ICT in the industry from universities, colleges, and practice. The conference aims to draw attention to modern trends in the field, to enable experts, pedagogues and scientific researchers to present the results achieved in their work, to exchange experiences and establish working contacts between meeting participants. The ARTEP proceedings includes papers on automation and control and their integration of technologies such as Industry 4.0, robotics, and IoT. ARTEP is primarily a conference for scientists and practitioners who develop and study automation, management, and technologies.