This book provides a concise survey of modern theoretical concepts of X-ray materials analysis. The principle features of the book are: basics of X-ray scattering, interaction between X-rays and matter and new theoretical concepts of X-ray scattering. The various X-ray techniques are considered in detail: high-resolution X-ray diffraction, X-ray reflectivity, grazing-incidence small-angle X-ray scattering and X-ray residual stress analysis. All the theoretical methods presented use the unified physical approach. This makes the book especially useful for readers learning and performing data analysis with different techniques. The theory is applicable to studies of bulk materials of all kinds, including single crystals and polycrystals as well as to surface studies under grazing incidence. The book appeals to researchers and graduate students alike.

A comprehensive overview of the possibilities and potential of X-ray scattering using nanofocused beams for probing matter at the nanoscale, including guidance on the design of nanobeam experiments. The monograph discusses various sources, including free electron lasers, synchrotron radiation and other portable and non-portable X-ray sources. For scientists using synchrotron radiation or students and scientists with a background in X-ray scattering methods in general.

This is the first book to present the direct method for solving the inverse problems in the X-ray multicomponent spectroscopy and small-angle X-ray scattering, X-ray diffraction tomography, grazing-incidence small-angle X-ray reflectometry of multilayer structures, and electron multibeam diffraction imaging. It considers the theory of numerical analysis of multivariate additive spectra of non-separable mixtures, and decodes data obtained using the X-ray diffraction tomography technique. The book also discusses the theory of high-resolution X-ray reflectometry (HRXR) of multilayer structures (MLS) based on the modified Parratt relationships for reflection and transmission coefficients and the phase problem in electron structural crystallography.

Functional Thin Films Technology features the functional aspects of thin films, such as their application in solar selective absorbers, fiber lasers, solid oxide fuel cells, piezo-related areas, catalysts, superhydrophobicity, semiconductors, and trace pesticides detection. It highlights developments and advances in the preparation, characterization, and applications of functional micro-/nano-scaled films and coatings. This book Presents technologies aimed at functionality used in nanoelectronics, solar selective absorbers, solid oxide fuel cells, piezo-applications, and sensors Covers absorbers, catalysts, anodic aluminum oxide, superhydrophobics, and semiconductor devices Features a chapter on transport phenomena associated to structures Discusses transport phenomena and material informatics This second volume in the two-volume set, Protective Thin Coatings and Functional Thin Films Technology, will benefit industry professionals and researchers working in areas related to semiconductors, optoelectronics, plasma technology, solid-state energy storages, and 5G, as well as advanced students studying electrical, mechanical, chemical, and materials engineering.

ways in which the magnetic interaction between neutrons and magnetic moments can yield information on the magnetization densities of thin ?lms and multilayers. I commend the organizers for having organized a group of expert lecturers to present this subject in a detailed but clear fashion, as the importance of the subject deserves. Argonne, IL S. K. Sinha Contents 1 The Interaction of X-Rays (and Neutrons) with Matter . . . . . . . . . . . . . . 1 F. de Bergevin 1. 1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1. 2 Generalities and De?nitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 1. 3 From the Scattering by an Object to the Propagation in a Medium . 14 1. 4 X-Rays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 1. 5 X-Rays: Anisotropic Scattering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47 1. A Appendix: the Born Approximation . . . . . . . . . . . . . . . . . . . . . . . . . . 54 References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56 2 Statistical Aspects of Wave Scattering at Rough Surfaces . . . . . . . . . . . . 59 A. Sentenac and J. Daillant 2. 1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59 2. 2 Description of Randomly Rough Surfaces . . . . . . . . . . . . . . . . . . . . . 60 2. 3 Description of a Surface Scattering Experiment, Coherence Domains . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67 2. 4 Statistical Formulation of the Diffraction Problem . . . . . . . . . . . . . . 72 2. 5 Statistical Formulation of the Scattered Intensity Under the Born Approximation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79 References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84 3 Specular Re?ectivity from Smooth and Rough Surfaces . . . . . . . . . . . . . 85 A. Gibaud and G. Vignaud 3. 1 The Re?ected Intensity from an Ideally Flat Surface . . . . . . . . . . . . 85 3. 2 X-Ray Re?ectivity in Strati?ed Media . . . . . . . . . . . . . . . . . . . . . . . . 98 3. 3 From Dynamical to Kinematical Theory . . . . . . . . . . . . . . . . . . . . . . 107 3. 4 In?uence of the Roughness on the Matrix Coef?cients . . . . . . . . . . 111 3. A Appendix: The Treatment of Roughness in Specular Re?ectivity . . 113 3. B Appendix: Inversion of re?ectivity data . . . . . . . . . . . . . . . . . . . . . . .

From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to meet these technological requirements, all based on a few processes that govern the interactions of particles and radiation with matter. This book addresses the fundamentals and application of these processes, from thin films to field effect transistors.

The reflection of and neutrons from surfaces has existed as an x-rays exp- imental for almost it is in the last technique fifty Nevertheless, only years. decade that these methods have become as of enormously popular probes This the surfaces and interfaces. to be due to of several appears convergence of intense different circumstances. These include the more n- availability be measured orders tron and sources that can over (so reflectivity x-ray many of and the much weaker surface diffuse can now also be magnitude scattering of thin films and studied in some the detail); growing importance multil- basic the realization of the ers in both and technology research; important which in the of surfaces and and role roughness plays properties interfaces; the of statistical models to characterize the of finally development topology its and its characterization from on roughness, dependence growth processes The of and to surface scattering experiments. ability x-rays neutro4s study four five orders of in scale of surfaces over to magnitude length regardless their and also their to ability probe environment, temperature, pressure, etc. , makes these the choice for buried interfaces often probes preferred obtaining information about the microstructure of often in statistical a global surfaces, the local This is manner to complementary imaging microscopy techniques, of such studies in the literature witnessed the veritable by explosion published the last few Thus these lectures will useful for over a resource years.