The Preparation and Structure of Thin Films of Boron on Silicon
Title | The Preparation and Structure of Thin Films of Boron on Silicon PDF eBook |
Author | E. T. Peters |
Publisher | |
Pages | 14 |
Release | 1965 |
Genre | Boron |
ISBN |
The Preparation and Structure of Thin Films of Boron on Silicon
Title | The Preparation and Structure of Thin Films of Boron on Silicon PDF eBook |
Author | E. T. Peters |
Publisher | |
Pages | 0 |
Release | 1965 |
Genre | Boron |
ISBN |
Moyen sûr de faire baisser l'intérêt de l'argent, par conséquent de diminuer celui de la dette nationale sans injustice et sans violence
Title | Moyen sûr de faire baisser l'intérêt de l'argent, par conséquent de diminuer celui de la dette nationale sans injustice et sans violence PDF eBook |
Author | |
Publisher | |
Pages | |
Release | 1788 |
Genre | |
ISBN |
The Preparation of Thin Boron Films
Title | The Preparation of Thin Boron Films PDF eBook |
Author | R. W. Dodson |
Publisher | |
Pages | 10 |
Release | 1944 |
Genre | Boron |
ISBN |
Technical Abstract Bulletin
Title | Technical Abstract Bulletin PDF eBook |
Author | |
Publisher | |
Pages | 828 |
Release | |
Genre | Science |
ISBN |
Borophosphosilicate Glass Thin Films in Electronics
Title | Borophosphosilicate Glass Thin Films in Electronics PDF eBook |
Author | Vladislav I︠U︡rʹevich Vasilʹev |
Publisher | Nova Science Publishers |
Pages | 0 |
Release | 2013 |
Genre | Boron compounds |
ISBN | 9781624179594 |
This comprehensive monograph summarises the 30-year studies of borophosphosilicate glass (BPSG) thin film used in electronic technologies, including the authors personal experience with the film deposition, characterisation, and implementation in microelectronic technology. The main core of the monograph is the interrelation of chemical vapour deposition (CVD) kinetic features, thin film material properties, and electronic device technology aspects. Part one of the monograph is devoted to the analysis of thin film synthesis, such as: CVD methodology and BPSG film processes, silicon dioxide and glass film growth kinetics, CVD step coverage and gap-fill features. Part two of the book is a description of BPSG film properties, film structure, glass flow capability, BPSG film-moisture interaction and the film defect formation phenomenon. A number of experimental data are presented and discussed in detail.
Borophosphosilicate Glass Thin Films in Electronics
Title | Borophosphosilicate Glass Thin Films in Electronics PDF eBook |
Author | V Eiiu Vasilev |
Publisher | Nova Science Publishers |
Pages | 261 |
Release | 2014-05-14 |
Genre | Science |
ISBN | 9781626180345 |
This comprehensive monograph summarizes the 30-year studies of borophosphosilicate glass (BPSG) thin film used in electronic technologies, including the authors personal experience with the film deposition, characterization, and implementation in microelectronic technology. The main core of the monograph is the interrelation of chemical vapor deposition (CVD) kinetic features, thin film material properties, and electronic device technology aspects. Part one of the monograph is devoted to the analysis of thin film synthesis, such as: CVD methodology and BPSG film processes, silicon dioxide and glass film growth kinetics, CVD step coverage and gap-fill features. Part two of the book is a description of BPSG film properties, film structure, glass flow capability, BPSG film-moisture interaction and the film defect formation phenomenon. A number of experimental data are presented and discussed in detail.