Gaseous Electronics Conference Radio-Frequency Reference Cell
Title | Gaseous Electronics Conference Radio-Frequency Reference Cell PDF eBook |
Author | James K. Olthoff |
Publisher | DIANE Publishing |
Pages | 181 |
Release | 1996 |
Genre | |
ISBN | 078812708X |
The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, and theoretical modeling. This report contains 12 articles that review nearly all of the experiments and theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a "users' guide" to the operation and performance of the GEC cell.
The Gaseous Electronics Conference RF Reference Cell
Title | The Gaseous Electronics Conference RF Reference Cell PDF eBook |
Author | Gaseous Electronics Conference. 48, 1995, Berkeley, Calif.. |
Publisher | |
Pages | 194 |
Release | 1995 |
Genre | |
ISBN |
Special Issue
Title | Special Issue PDF eBook |
Author | |
Publisher | |
Pages | 194 |
Release | 1995 |
Genre | Electronics |
ISBN |
Particle Trapping, Transport and Charge in Capacitively and Inductively Coupled Plasmas in a Gaseous Electronics Conference Rf Reference Cell (PHD).
Title | Particle Trapping, Transport and Charge in Capacitively and Inductively Coupled Plasmas in a Gaseous Electronics Conference Rf Reference Cell (PHD). PDF eBook |
Author | Sean Michael 1959 Collins |
Publisher | |
Pages | 0 |
Release | 1997 |
Genre | |
ISBN |
Publications of the National Institute of Standards and Technology ... Catalog
Title | Publications of the National Institute of Standards and Technology ... Catalog PDF eBook |
Author | National Institute of Standards and Technology (U.S.) |
Publisher | |
Pages | 1162 |
Release | 1994 |
Genre | |
ISBN |
Journal of Research of the National Institute of Standards and Technology
Title | Journal of Research of the National Institute of Standards and Technology PDF eBook |
Author | |
Publisher | |
Pages | 842 |
Release | 1995 |
Genre | Chemistry |
ISBN |
Reports NIST research and development in the physical and engineering sciences in which the Institute is active. These include physics, chemistry, engineering, mathematics, and computer sciences. Emphasis on measurement methodology and the basic technology underlying standardization.
Plasma Processing of Semiconductors
Title | Plasma Processing of Semiconductors PDF eBook |
Author | P.F. Williams |
Publisher | Springer Science & Business Media |
Pages | 610 |
Release | 2013-11-11 |
Genre | Technology & Engineering |
ISBN | 9401158843 |
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.