Synthesis of Hafnium Silylamide Complexes and the Chemical Vapor Deposition of (HfO2)x(SiO2)y Films
Title | Synthesis of Hafnium Silylamide Complexes and the Chemical Vapor Deposition of (HfO2)x(SiO2)y Films PDF eBook |
Author | Edixa de Lourdes Jiménez |
Publisher | |
Pages | 58 |
Release | 2007 |
Genre | Hafnium compounds |
ISBN |
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