Special Issue: Chemical Vapor Deposition and Atomic Layer Deposition: Precursor Design and Application
Title | Special Issue: Chemical Vapor Deposition and Atomic Layer Deposition: Precursor Design and Application PDF eBook |
Author | |
Publisher | |
Pages | 232 |
Release | 2013 |
Genre | |
ISBN |
Precursor Chemistry of Advanced Materials
Title | Precursor Chemistry of Advanced Materials PDF eBook |
Author | Roland A. Fischer |
Publisher | Springer Science & Business Media |
Pages | 240 |
Release | 2005-09-29 |
Genre | Science |
ISBN | 9783540016052 |
Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new routes for designing and synthesizing new precursors as well as the application of established molecular precursors to derive tuneable materials for technological demands. With regard to the precursor chemistry, a most detailed understanding of the mechanistic complexity of materials formation from molecular precursors is very important for further development of new processes and advanced materials. To emphasize and stimulate research in these areas, this volume comprises a selection of case studies covering various key-aspects of the interplay of precursor chemistry with the process conditions of materials formation, particularly looking at the similarities and differences of CVD, ALD and nanoparticle synthesis, e.g. colloid chemistry, involving tailored molecular precursors.
Advances in Chemical Vapor Deposition
Title | Advances in Chemical Vapor Deposition PDF eBook |
Author | Dimitra Vernardou |
Publisher | MDPI |
Pages | 94 |
Release | 2021-01-15 |
Genre | Science |
ISBN | 3039439235 |
Pursuing a scalable production methodology for materials and advancing it from the laboratory to industry is beneficial to novel daily-life applications. From this perspective, chemical vapor deposition (CVD) offers a compromise between efficiency, controllability, tunability and excellent run-to-run repeatability in the coverage of monolayers on substrates. Hence, CVD meets all of the requirements for industrialization in basically all areas, including polymer coatings, metals, water-filtration systems, solar cells and so on. The Special Issue “Advances in Chemical Vapor Deposition” is dedicated to providing an overview of the latest experimental findings and identifying the growth parameters and characteristics of perovskites, TiO2, Al2O3, VO2 and V2O5 with desired qualities for potentially useful devices.
Chemical Vapour Deposition
Title | Chemical Vapour Deposition PDF eBook |
Author | Anthony C. Jones |
Publisher | Royal Society of Chemistry |
Pages | 600 |
Release | 2009 |
Genre | Science |
ISBN | 0854044655 |
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket
Atomic Layer Deposition Applications 6
Title | Atomic Layer Deposition Applications 6 PDF eBook |
Author | J. W. Elam |
Publisher | The Electrochemical Society |
Pages | 469 |
Release | 2010-10 |
Genre | Science |
ISBN | 1566778212 |
The continuously expanding realm of Atomic Layer Deposition (ALD) Applications is the focus of this reoccurring symposium. ALD can enable the precise deposition of ultra-thin, highly conformal coatings over complex 3D topographies with controlled thickness and composition. This issue of ECS Transactions contains peer reviewed papers presented at the symposium. A broad spectrum of ALD applications is featured, including novel nano-composites and nanostructures, dielectrics for state-of-the-art transistors and capacitors, optoelectronics, and a variety of other emerging applications.
Atomic Layer Deposition for Semiconductors
Title | Atomic Layer Deposition for Semiconductors PDF eBook |
Author | Cheol Seong Hwang |
Publisher | Springer Science & Business Media |
Pages | 266 |
Release | 2013-10-18 |
Genre | Science |
ISBN | 146148054X |
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Chemistry of Atomic Layer Deposition
Title | Chemistry of Atomic Layer Deposition PDF eBook |
Author | Seán Thomas Barry |
Publisher | Walter de Gruyter GmbH & Co KG |
Pages | 113 |
Release | 2021-11-08 |
Genre | Technology & Engineering |
ISBN | 3110712539 |
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.