Wafer Manufacturing
Title | Wafer Manufacturing PDF eBook |
Author | Imin Kao |
Publisher | John Wiley & Sons |
Pages | 304 |
Release | 2021-01-11 |
Genre | Technology & Engineering |
ISBN | 0470061219 |
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
Crystal Growth and Evaluation of Silicon for VLSI and ULSI
Title | Crystal Growth and Evaluation of Silicon for VLSI and ULSI PDF eBook |
Author | Golla Eranna |
Publisher | CRC Press |
Pages | 432 |
Release | 2014-12-08 |
Genre | Science |
ISBN | 1482232812 |
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges. Crystal Growth and Evaluation of Silicon for VLSI and ULSI is one of the first books to cover the systematic growth of silicon single crystals and the complete evaluation of silicon, from sand to useful wafers for device fabrication. Written for engineers and researchers working in semiconductor fabrication industries, this practical text: Describes different techniques used to grow silicon single crystals Explains how grown single-crystal ingots become a complete silicon wafer for integrated-circuit fabrication Reviews different methods to evaluate silicon wafers to determine suitability for device applications Analyzes silicon wafers in terms of resistivity and impurity concentration mapping Examines the effect of intentional and unintentional impurities Explores the defects found in regular silicon-crystal lattice Discusses silicon wafer preparation for VLSI and ULSI processing Crystal Growth and Evaluation of Silicon for VLSI and ULSI is an essential reference for different approaches to the selection of the basic silicon-containing compound, separation of silicon as metallurgical-grade pure silicon, subsequent purification, single-crystal growth, and defects and evaluation of the deviations within the grown crystals.
Properties of Crystalline Silicon
Title | Properties of Crystalline Silicon PDF eBook |
Author | Robert Hull |
Publisher | IET |
Pages | 1054 |
Release | 1999 |
Genre | Electronic books |
ISBN | 9780852969335 |
A unique and well-organized reference, this book provides illuminating data, distinctive insight and expert guidance on silicon properties.
Heterostructure Single Crystal Silicon Photovoltaic Solar Cells
Title | Heterostructure Single Crystal Silicon Photovoltaic Solar Cells PDF eBook |
Author | |
Publisher | |
Pages | 68 |
Release | 1978 |
Genre | Solar batteries |
ISBN |
Heterostructure Single Crystal Silicon Photovoltaic Cell, Extension
Title | Heterostructure Single Crystal Silicon Photovoltaic Cell, Extension PDF eBook |
Author | Exxon Research and Engineering Company. Government Research Laboratories |
Publisher | |
Pages | 56 |
Release | 1979 |
Genre | Photovoltaic power generation |
ISBN |
Wafer Manufacturing
Title | Wafer Manufacturing PDF eBook |
Author | Imin Kao |
Publisher | John Wiley & Sons |
Pages | 304 |
Release | 2021-01-05 |
Genre | Technology & Engineering |
ISBN | 1118696239 |
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
Essentials of Heat Transfer
Title | Essentials of Heat Transfer PDF eBook |
Author | Massoud Kaviany |
Publisher | Cambridge University Press |
Pages | 749 |
Release | 2011-08 |
Genre | Science |
ISBN | 1107012406 |
This is a modern, example-driven introductory textbook on heat transfer, with modern applications, written by a renowned scholar.