Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Diele[c]trics VIII
Title | Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Diele[c]trics VIII PDF eBook |
Author | Ram Ekwal Sah |
Publisher | The Electrochemical Society |
Pages | 606 |
Release | 2005 |
Genre | Nature |
ISBN | 9781566774598 |
Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9
Title | Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9 PDF eBook |
Author | Ram Ekwal Sah |
Publisher | The Electrochemical Society |
Pages | 863 |
Release | 2007 |
Genre | Dielectric films |
ISBN | 1566775523 |
This issue of ECS Transactions contains the papers presented in the symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectics held May 6-11, 2007 in Chicago. Papers were presented on deposition, characterization and applications of the dielectrics including high- and low-k dielectrics, as well as interface states, device characterization, reliabiliy and modeling.
Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title | Silicon Nitride and Silicon Dioxide Thin Insulating Films PDF eBook |
Author | M. Jamal Deen |
Publisher | The Electrochemical Society |
Pages | 610 |
Release | 1997 |
Genre | Science |
ISBN | 9781566771375 |
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films PDF eBook |
Author | Vikram J. Kapoor |
Publisher | |
Pages | 570 |
Release | 1987 |
Genre | Electric and insulation |
ISBN |
Silicon Nitride and Silicon Dioxide Thin Insulating Films VII
Title | Silicon Nitride and Silicon Dioxide Thin Insulating Films VII PDF eBook |
Author | Electrochemical Society. Meeting |
Publisher | The Electrochemical Society |
Pages | 652 |
Release | 2003 |
Genre | Science |
ISBN | 9781566773478 |
Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title | Silicon Nitride and Silicon Dioxide Thin Insulating Films PDF eBook |
Author | |
Publisher | |
Pages | 306 |
Release | 1999 |
Genre | Silicon dioxide |
ISBN |
Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10
Title | Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10 PDF eBook |
Author | R. Ekwal Sah |
Publisher | The Electrochemical Society |
Pages | 871 |
Release | 2009 |
Genre | Dielectric films |
ISBN | 1566777100 |
The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.