Silicon Device Processing

Silicon Device Processing
Title Silicon Device Processing PDF eBook
Author Charles P. Marsden
Publisher
Pages 472
Release 1970
Genre Electronics
ISBN

Download Silicon Device Processing Book in PDF, Epub and Kindle

The objective of the Symposium was to provide an opportunity for engineers and applied scientists actively engaged in the silicon device technology field to discuss the most advanced measurement methods for process control and materials characterization.The basic theme of the meeting was to stress the interdependence of measurements techniques, facilities, and materials as they relate to the overall problems of improving and advancing silicon device sciences and technologies.(Author).

Silicon Devices and Process Integration

Silicon Devices and Process Integration
Title Silicon Devices and Process Integration PDF eBook
Author Badih El-Kareh
Publisher Springer Science & Business Media
Pages 614
Release 2009-01-09
Genre Technology & Engineering
ISBN 0387690107

Download Silicon Devices and Process Integration Book in PDF, Epub and Kindle

Silicon Devices and Process Integration covers state-of-the-art silicon devices, their characteristics, and their interactions with process parameters. It serves as a comprehensive guide which addresses both the theoretical and practical aspects of modern silicon devices and the relationship between their electrical properties and processing conditions. The book is compiled from the author’s industrial and academic lecture notes and reflects years of experience in the development of silicon devices. Features include: A review of silicon properties which provides a foundation for understanding the device properties discussion, including mobility-enhancement by straining silicon; State-of-the-art technologies on high-K gate dielectrics, low-K dielectrics, Cu interconnects, and SiGe BiCMOS; CMOS-only applications, such as subthreshold current and parasitic latch-up; Advanced Enabling processes and process integration. This book is written for engineers and scientists in semiconductor research, development and manufacturing. The problems at the end of each chapter and the numerous charts, figures and tables also make it appropriate for use as a text in graduate and advanced undergraduate courses in electrical engineering and materials science.

Ultraclean Surface Processing of Silicon Wafers

Ultraclean Surface Processing of Silicon Wafers
Title Ultraclean Surface Processing of Silicon Wafers PDF eBook
Author Takeshi Hattori
Publisher Springer Science & Business Media
Pages 634
Release 2013-03-09
Genre Technology & Engineering
ISBN 3662035359

Download Ultraclean Surface Processing of Silicon Wafers Book in PDF, Epub and Kindle

A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for the first time the secrets of these highly productive institutions. They describe the techniques and equipment necessary for the preparation of clean high-quality semiconductor surfaces as a first step in high-yield/high-quality device production. This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.

Process Technology for Silicon Carbide Devices

Process Technology for Silicon Carbide Devices
Title Process Technology for Silicon Carbide Devices PDF eBook
Author Carl-Mikael Zetterling
Publisher IET
Pages 202
Release 2002
Genre Technology & Engineering
ISBN 9780852969984

Download Process Technology for Silicon Carbide Devices Book in PDF, Epub and Kindle

This book explains why SiC is so useful in electronics, gives clear guidance on the various processing steps (growth, doping, etching, contact formation, dielectrics etc) and describes how these are integrated in device manufacture.

Advances in Silicon Carbide Processing and Applications

Advances in Silicon Carbide Processing and Applications
Title Advances in Silicon Carbide Processing and Applications PDF eBook
Author Stephen E. Saddow
Publisher Artech House
Pages 236
Release 2004
Genre Science
ISBN 9781580537414

Download Advances in Silicon Carbide Processing and Applications Book in PDF, Epub and Kindle

Learn the latest advances in SiC (Silicon Carbide) technology from the leading experts in the field with this new cutting-edge resource. The book is your single source for in-depth information on both SiC device fabrication and system-level applications. This comprehensive reference begins with an examination of how SiC is grown and how defects in SiC growth can affect working devices. Key issues in selective doping of SiC via ion implantation are covered with special focus on implant conditions and electrical activation of implants. SiC applications discussed include chemical sensors, motor-control components, high-temperature gas sensors, and high-temperature electronics. By cutting through the arcane data and jargon surrounding the hype on SiC, this book gives an honest assessment of today's SiC technology and shows you how SiC can be adopted in developing tomorrow's applications.

Silicon Devices

Silicon Devices
Title Silicon Devices PDF eBook
Author Kenneth A. Jackson
Publisher John Wiley & Sons
Pages 210
Release 2008-11-21
Genre Technology & Engineering
ISBN 3527611797

Download Silicon Devices Book in PDF, Epub and Kindle

Silicon is the most important material for the electronics industry. In modern microelectronics silicon devices like diodes and transistors play a major role, and devices like photodetectors or solar cells gain ever more importance. This concise handbook deals with one of the most important topics for the electronics industry. World renowned authors have contributed to this unique overview of the processing of silicon and silicon devices.

Metal Impurities in Silicon-Device Fabrication

Metal Impurities in Silicon-Device Fabrication
Title Metal Impurities in Silicon-Device Fabrication PDF eBook
Author Klaus Graff
Publisher Springer Science & Business Media
Pages 228
Release 2013-03-08
Genre Technology & Engineering
ISBN 3642975933

Download Metal Impurities in Silicon-Device Fabrication Book in PDF, Epub and Kindle

A discussion of the different mechanisms responsible for contamination together with a survey of their impact on device performance. The author examines the specific properties of main and rare impurities in silicon, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine gettering efficiency. Throughout all of these subjects, the book presents only reliable and up-to-date data so as to provide a thorough review of recent scientific investigations.