Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

The hardest requirements on a material are in general imposed at the surface: it has to be wear resistant for tools and bearings; corrosion resistant for turbine blades; antireflecting for solar cells; and it must combine several of these properties in other applications. `Surface engineering' is the general term that incorporates all the techniques by which a surface modification can be accomplished. These techniques include both the more traditional methods, such as nitriding, boriding and carburizing, and the newer ones, such as ion implantation, laser beam melting and, in particular, coating. This book comprises and compares in a unique way all these techniques of surface engineering. It is a compilation of lectures which were held by renowned scientists and engineers in the frame of the well known `EuroCourses' of the Joint Research Centre of the Commission of the European Communities. The book is principally addressed to material and surface scientists, physicists and chemists, engineers and technicians of industries and institutes where surface engineering problems arise.

Prepared as a textbook complete with problems after each chapter, specifically intended for classroom use in universities.

Shape-memory polymers (SMP) are a unique branch of the smart materials family which are capable of changing shape on-demand upon exposure to external stimulus. The discovery of SMP made a significant breakthrough in the developments of novel smart materials for a variety of engineering applications, superseded the traditional materials, and also influenced the current methods of product designing. This book provides the latest advanced information of on-going research domains of SMP. This will certainly enlighten the reader to the achievements and tremendous potentials of SMP. The basic fundamentals of SMP, including shape-memory mechanisms and mechanics are described. This will aid reader to become more familiar with SMP and the basic concepts, thus guiding them in undergoing independent research in the SMP field. The book also provides the reader with associated challenges and existing application problems of SMP. This could assist the reader to focus more on these issues and further exploit their knowledge to look for innovative solutions. Future outlooks of SMP research are discussed as well. This book should prove to be extremely useful for academics, R&D managers, researcher scientists, engineers, and all others related to the SMP research.

This book guides beginners in the areas of thin film preparation, characterization, and device making, while providing insight into these areas for experts. As chemically deposited metal oxides are currently gaining attention in development of devices such as solar cells, supercapacitors, batteries, sensors, etc., the book illustrates how the chemical deposition route is emerging as a relatively inexpensive, simple, and convenient solution for large area deposition. The advancement in the nanostructured materials for the development of devices is fully discussed.

With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thin films. Very much an interdisciplinary field, chemists, biochemists, materials scientists, physicists and engineers all have a common interest in thin films and their manifold uses and applications. Grain size, porosity, density, preferred orientation and other properties are important to know: whether thin films fulfill their intended function depends crucially on their structure and morphology once a chemical composition has been chosen. Although their backgrounds differ greatly, all the involved specialists a profound understanding of how structural properties may be determined in order to perform their respective tasks in search of new and modern materials, coatings and functions. The author undertakes this in-depth introduction to the field of thin film X-ray characterization in a clear and precise manner.