This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.

This emission scenario document (ESD) for chemicals used in the electronics industry provides information on the sources and release pathways of chemicals during various processing techniques in this varied industry sector, to help estimate releases of chemicals into the environment.

This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of non-volatile chemicals used in textile dyes. The document focuses primarily on the application of dyes to fibers, yarns and fabrics by batch or continuous processes.

This OECD Emission Scenario Document (ESD) is a complement document to the Coating Industry (Paints, Lacquers and Varnishes, ESD No. 22 and provides information on the sources, use pattern and release pathways of chemicals used as solvents for industrial coatings, so as to help estimating the amount of chemicals released into the environment.

This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry.

Presents an extensive, comprehensive study of chemical vapor deposition (CVD). Understanding CVD requires knowledge of fluid mechanics, plasma physics, chemical thermodynamics, and kinetics as well as homogenous and heterogeneous chemical reactions. This text presents these aspects of CVD in an integrated fashion, and also reviews films for use in integrated circuit technology.