The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Sensors, Actuators, and Microsystems General Session¿, held during the 215th meeting of The Electrochemical Society, in San Francisco, CA from May 24 to 29, 2009.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

An introduction to the engineering principles of embedded systems, with a focus on modeling, design, and analysis of cyber-physical systems. The most visible use of computers and software is processing information for human consumption. The vast majority of computers in use, however, are much less visible. They run the engine, brakes, seatbelts, airbag, and audio system in your car. They digitally encode your voice and construct a radio signal to send it from your cell phone to a base station. They command robots on a factory floor, power generation in a power plant, processes in a chemical plant, and traffic lights in a city. These less visible computers are called embedded systems, and the software they run is called embedded software. The principal challenges in designing and analyzing embedded systems stem from their interaction with physical processes. This book takes a cyber-physical approach to embedded systems, introducing the engineering concepts underlying embedded systems as a technology and as a subject of study. The focus is on modeling, design, and analysis of cyber-physical systems, which integrate computation, networking, and physical processes. The second edition offers two new chapters, several new exercises, and other improvements. The book can be used as a textbook at the advanced undergraduate or introductory graduate level and as a professional reference for practicing engineers and computer scientists. Readers should have some familiarity with machine structures, computer programming, basic discrete mathematics and algorithms, and signals and systems.

Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life. This book presents a unique overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc. These are four essential subjects emphasized in the book: 1. Survey of the (current) research and development; 2. Fundamental theories and tools; 3. Practical applications. 4. Outlining future research and development.

An overview of the principles & current technology of the main sensor types used for flammable gas detection, oxygen monitoring in combustion & car-exhaust control. Also includes toxic gas monitoring. A companion volume to Techniques & Mechanisms in Gas Sensing.