The aim of this thesis is to show how the robust H1 control method can be applied to fast tracking position control problems in nano-positioning and atomic force microscopy. The key component used in the nano-positioning system and atomic force microscope positioning system is a piezoelectric actuator which makes motion control at the sub-nanometer level possible. A significant challenging issue in the use of piezoelectric actuators is the existence of hysteresis nonlinearity which limits the accuracy of position control. This research involves designing three robust H1 tracking controllers for three different systems: controlling hysteresis nonlinearity in a piezoelectric stack actuator using a charge output, controlling displacement tracking in a nano-positioning system, and improving fast tracking in a position control problem for an atomic force microscope (AFM). The approach considered in this research is to utilize H1 control theory to control piezoelectric actuator systems with hysteresis nonlinearity. These robust H1 controllers were designed based on physical models for these three systems considering both mechanical and electrical sides separately. The parameters used in the nonlinear models were obtained from experimental measurements. Experimental results showed that the robust H1 controller yields highly accurate tracking of displacement and also significantly reduces the nonlinear hysteresis. Each robust H1 controller was implemented in a dSpace DSP system. The experimental results obtained using the robust H1 controllers have been analysed and discussed in this thesis. This research has provided good evidence to demonstrate that high levels of accuracy in tracking displacement can be achieved by using the robust H1 control method in nano-positioning systems.

This book explores emerging methods and algorithms that enable precise control of micro-/nano-positioning systems. The text describes three control strategies: hysteresis-model-based feedforward control and hysteresis-model-free feedback control based on and free from state observation. Each paradigm receives dedicated attention within a particular part of the text. Readers are shown how to design, validate and apply a variety of new control approaches in micromanipulation: hysteresis modelling, discrete-time sliding-mode control and model-reference adaptive control. Experimental results are provided throughout and build up to a detailed treatment of practical applications in the fourth part of the book. The applications focus on control of piezoelectric grippers. Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems will assist academic researchers and practising control and mechatronics engineers interested in suppressing sources of nonlinearity such as hysteresis and drift when combining position and force control of precision systems with piezoelectric actuation.

Smart Materials-Based Actuators at the Micro/Nano-Scale: Characterization, Control, and Applications gives a state of the art of emerging techniques to the characterization and control of actuators based on smart materials working at the micro/nano scale. The book aims to characterize some commonly used structures based on piezoelectric and electroactive polymeric actuators and also focuses on various and emerging techniques employed to control them. This book also includes two of the most emerging topics and applications: nanorobotics and cells micro/nano-manipulation.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control. Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging. Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

Currently, many smart materials exhibit one or multifunctional capabilities that are being effectively exploited in various engineering applications, but these are only a hint of what is possible. Newer classes of smart materials are beginning to display the capacity for self-repair, self-diagnosis, self-multiplication, and self-degradation. Ultimately, what will make them practical and commercially viable are control devices that provide sufficient speed and sensitivity. While there are other candidates, piezoelectric actuators and sensors are proving to be the best choice. Piezoelectric Actuators: Control Applications of Smart Materials details the authors’ cutting-edge research and development in this burgeoning area. It presents their insights into optimal control strategies, reflecting their latest collection of refereed international papers written for a number of prestigious journals. Piezoelectric materials are incorporated in devices used to control vibration in flexible structures. Applications include beams, plates, and shells; sensors and actuators for cabin noise control; and position controllers for structural systems such as the flexible manipulator, engine mount, ski, snowboard, robot gripper, ultrasonic motors, and various type of sensors including accelerometer, strain gage, and sound pressure gages. The contents and design of this book make it useful as a professional reference for scientists and practical engineers who would like to create new machines or devices featuring smart material actuators and sensors integrated with piezoelectric materials. With that goal in mind, this book: Describes the piezoelectric effect from a microscopic point of view Addresses vibration control for flexible structures and other methods that use active mount Covers control of flexible robotic manipulators Discusses application to fine-motion and hydraulic control systems Explores piezoelectric shunt technology This book is exceptionally valuable as a reference for professional engineers working at the forefront of numerous industries. With its balanced presentation of theory and application, it will also be of special interest to graduate students studying control methodology.

This book comprises a selection of the presentations made at the “Workshop on Dynamics and Control of Micro and Nanoscale Systems” held at IBM Research – Zurich, Switzerland, on the 10th and 11th of December 2009. The aim of the workshop was to bring together some of the leading researchers in the field of dynamics and control of micro- and nanoscale systems. It proved an excellent forum for discussing new ideas and approaches.