Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.

In order to incorporate the RF MEMS technology with the 3D MMICs technology, a novel RF MEMS switch was designed and implemented in a 3D MMIC circuit environment. RF MEMS switches possess many advantages compared to traditional solid-state switches, such as high electromechanical isolation, and ultra-low power consumption. The novelty of this switch was that it was based on low temperature processing techniques. Design equations for a shielded coplanar waveguide were derived for the switch. Traditional lumped element capacitor model and this newly developed distributed transmission line models were compared against measured data to verify their validity. While measurement results show good agreement with both models, the distributed model consistently demonstrated better match than its lumped element counterpart. Test and measurement results showed that a typical RF MEMS switch was capable of delivering less than 0.2dB insertion loss and more than 14.1dB isolation between input and output ports at X-band (8GHz-12GHz). This RF MEMS switch required only 12V actuation voltage while it was capable of handling 2.88W RF power before "hot-switching" occurs. Hysteretic phenomenon of RF MEMS switches was observed; release voltage threshold was found to be around 2V 4V, much lower than the one required for pulling down the structure. Switching speeds of RF MEMS switches with different beam strength were measured using a novel experimental setup utilizing couplers as bias networks. The fastest switches demonstrated maximum switching speed of 3.571 kHz and more than 10,800,000 life cycles. As the application of RF MEMS switches, a 4-bit digital phase shifter was designed and fabricated. 180ʻ bit and 90ʻ bits were realized using reflection type phase shifters, while the 45ʻ and 22.5ʻ bits were achieved using loaded-line type phase shifters. A novel reflection type phase shifter loaded with multiple switch pairs was developed and was capable of delivering multiple phase shift angles within one circuit stage. Phase shifter measurement results were consistent with simulated results.

This is the first comprehensive book to address the design of RF MEMS-based circuits for use in high performance wireless systems. A groundbreaking research and reference tool, the book enables you to understand the realm of applications of RF MEMS technology; become knowledgeable of the wide variety and performance levels of RF MEMS devices; and partition the architecture of wireless systems to achieve greater levels of performance. This innovative resource also guides you through the design process of RF MEMS-based circuits, and establishes a practical knowledge base for the design of high-yield RF MEMS-based circuits. The book features exercises and detailed case studies on working RF MEMS circuits that help you decide what approaches best fit your design constraints. This unified treatment of RF MEMS-based circuit technology opens up a new world of solutions for meeting the unique challenges of low power/portable wireless products.

Antennas systems play a critical role in modern electronic warfare communications and radar. Today's EW engineers need to have a solid understanding of the design principles of this technology and how antenna systems are used in the field. This comprehensive book serves as a one-stop resource for practical EW antenna system know-how. Supported with over 700 illustrations and nearly 1,700 equations, this authoritative reference offers professionals detailed explanations of all the important foundations and aspects of this technology. Moreover, engineers get an in-depth treatment of a wide range of antenna system applications. The book presents the key characteristics of each type of antenna, including dipoles, monopoles, loops, arrays, horns, and patches. Practitioners also find valuable discussions on the limitations of antennas system performance in EW applications.

The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications Discusses wireless techniques and applications of wireless MEMS, including biomedical applications Describes monitoring structures and the environment with wireless MEMS