Rapid Thermal and Integrated Processing V: Volume 429

Rapid Thermal and Integrated Processing V: Volume 429
Title Rapid Thermal and Integrated Processing V: Volume 429 PDF eBook
Author J. C. Gelpey
Publisher
Pages 416
Release 1996-10-14
Genre Technology & Engineering
ISBN

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This book is the latest in a continuing series on rapid thermal processing and related topics. It embraces a diversity of research, development and manufacturing activities that require rapid thermal and integrated processing techniques which are recognized by their acronyms, such as rapid thermal annealing (RTA), rapid thermal processing (RTP), rapid thermal chemical vapor deposition (RTCVP), rapid thermal oxidation (RTO), and others. This fifth anniversary volume reports notable advances in the use of rapid thermal techniques in processing science and technology, and for process control in industrial fabrication facilities. It is organized around progress obtained through: evaluation methodology; equipment and process modelling; temperature control; defects and diffusion associated with annealing; metallizations such as silicidation; novel processing of sol-gel and magnetic films; dielectric growth and deposition; and silicon or silicon-germanium film deposition.

Advances in Rapid Thermal Processing

Advances in Rapid Thermal Processing
Title Advances in Rapid Thermal Processing PDF eBook
Author Fred Roozeboom
Publisher The Electrochemical Society
Pages 470
Release 1999
Genre Technology & Engineering
ISBN 9781566772327

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Microwave Processing of Materials V: Volume 430

Microwave Processing of Materials V: Volume 430
Title Microwave Processing of Materials V: Volume 430 PDF eBook
Author Materials Research Society. Meeting
Publisher
Pages 696
Release 1996-10-28
Genre Technology & Engineering
ISBN

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Based on an international gathering of scientists and engineers from 17 countries, this book, the fifth in a continuing series, assesses microwave processing of materials as an emerging technology. Significant advances in understanding and control of microwave energy and its use in the processing and testing of materials are outlined. Future research and development needs are also explored. Topics include: scale-up and commercialization; microwave nondestructive testing; microwave processing; microwave system design; dielectric properties measurements and analysis; modelling of microwave heating; microwave interactions and mechanisms; microwave processing using variable frequency sources; alternate microwave sources; remediation of hazardous waste; temperature modelling and measurements; microwave processing of polymers; and plasma processing.

ULSI Science and Technology/1997

ULSI Science and Technology/1997
Title ULSI Science and Technology/1997 PDF eBook
Author Hisham Z. Massoud
Publisher The Electrochemical Society
Pages 686
Release 1997
Genre Computers
ISBN 9781566771306

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Ferroelectric Thin Films V: Volume 433

Ferroelectric Thin Films V: Volume 433
Title Ferroelectric Thin Films V: Volume 433 PDF eBook
Author Seshu B. Desu
Publisher
Pages 480
Release 1996-11-08
Genre Technology & Engineering
ISBN

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Scientific Basis for Nuclear Waste Management XX: Volume 465

Scientific Basis for Nuclear Waste Management XX: Volume 465
Title Scientific Basis for Nuclear Waste Management XX: Volume 465 PDF eBook
Author Walter J. Gray
Publisher
Pages 1398
Release 1997-07
Genre Technology & Engineering
ISBN

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This book features scientific research that supports the safe and effective disposal of radioactive waste in a geological repository. One highlight of the volume is the opening talk by Rustum Roy, who was instrumental in establishing the first symposium on this topic in 1978. Professor Roy summarizes his views of the past 19 years of progress in the field. A second highlight is the participation by several Russian and Ukrainian scientists who authored papers on nuclear waste disposal aspects of the Chernobyl Unit 4 reactor that exploded in April 1986. Additional topics include: glass formulations and properties; glass/water interactions; cements in radioactive waste management; ceramic and crystalline waste forms; spent nuclear fuel; waste processing and treatment; radiation effects in ceramics, glasses and nuclear waste materials; waste package materials; radionuclide solubility and speciation; radionuclide sorption; radionuclide transport; repository backfill; performance assessment; natural analogues and excess plutonium dispositioning.

Rapid Thermal and Integrated Processing III: Volume 342

Rapid Thermal and Integrated Processing III: Volume 342
Title Rapid Thermal and Integrated Processing III: Volume 342 PDF eBook
Author Jimmie J. Wortman
Publisher
Pages 472
Release 1994-08-02
Genre Technology & Engineering
ISBN

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.