Rapid Thermal and Integrated Processing III: Volume 342
Title | Rapid Thermal and Integrated Processing III: Volume 342 PDF eBook |
Author | Jimmie J. Wortman |
Publisher | |
Pages | 472 |
Release | 1994-08-02 |
Genre | Technology & Engineering |
ISBN |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Rapid Thermal and Integrated Processing
Title | Rapid Thermal and Integrated Processing PDF eBook |
Author | |
Publisher | |
Pages | 460 |
Release | 1997 |
Genre | Rapid thermal processing |
ISBN |
Intermetallic Matrix Composites III: Volume 350
Title | Intermetallic Matrix Composites III: Volume 350 PDF eBook |
Author | J. A. Graves |
Publisher | |
Pages | 334 |
Release | 1994-09 |
Genre | Science |
ISBN |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Advances in Rapid Thermal and Integrated Processing
Title | Advances in Rapid Thermal and Integrated Processing PDF eBook |
Author | F. Roozeboom |
Publisher | Springer Science & Business Media |
Pages | 568 |
Release | 2013-03-09 |
Genre | Science |
ISBN | 9401587116 |
Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Scintillator and Phosphor Materials: Volume 348
Title | Scintillator and Phosphor Materials: Volume 348 PDF eBook |
Author | Marvin J. Weber |
Publisher | |
Pages | 548 |
Release | 1994-11-25 |
Genre | Science |
ISBN |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Materials for Smart Systems: Volume 360
Title | Materials for Smart Systems: Volume 360 PDF eBook |
Author | Easo P. George |
Publisher | |
Pages | 584 |
Release | 1995-03-28 |
Genre | Technology & Engineering |
ISBN |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Advanced Metallization for Devices and Circuits--science, Technology, and Manufacturability
Title | Advanced Metallization for Devices and Circuits--science, Technology, and Manufacturability PDF eBook |
Author | S. P. Murarka |
Publisher | |
Pages | 794 |
Release | 1994 |
Genre | Technology & Engineering |
ISBN |