In 1968, the National Bureau of Standards (NBS) published Special Publication 298 "Quantitative Electron Probe Microanalysis," which contained proceedings of a seminar held on the subject at NBS in the summer of 1967. This publication received wide interest that continued through the years far beyond expectations. The present volume, also the result of a gathering of international experts, in 1988, at NBS (now the National Institute of Standards and Technology, NIST), is intended to fulfill the same purpose. After years of substantial agreement on the procedures of analysis and data evaluation, several sharply differentiated approaches have developed. These are described in this publi cation with all the details required for practical application. Neither the editors nor NIST wish to endorse any single approach. Rather, we hope that their exposition will stimulate the dialogue which is a prerequisite for technical progress. Additionally, it is expected that those active in research in electron probe microanalysis will appreciate more clearly the areas in which further investigations are warranted.

Examines practical and theoretical aspects of the techniques of electron-probe microanalysis, providing material both for practical microanalysts interested in problems and procedures and for researchers who require greater understanding of the principles and developments in correction models.

Originally published in 2005, this book covers the closely related techniques of electron microprobe analysis (EMPA) and scanning electron microscopy (SEM) specifically from a geological viewpoint. Topics discussed include: principles of electron-target interactions, electron beam instrumentation, X-ray spectrometry, general principles of SEM image formation, production of X-ray 'maps' showing elemental distributions, procedures for qualitative and quantitative X-ray analysis (both energy-dispersive and wavelength-dispersive), the use of both 'true' electron microprobes and SEMs fitted with X-ray spectrometers, and practical matters such as sample preparation and treatment of results. Throughout, there is an emphasis on geological aspects not mentioned in similar books aimed at a more general readership. The book avoids unnecessary technical detail in order to be easily accessible, and forms a comprehensive text on EMPA and SEM for geological postgraduate and postdoctoral researchers, as well as those working in industrial laboratories.

The first ICXOM congress held in Cambridge was the brain-child of Dr. Ellis Cosslett, founder of the Electron Optics Section of the Cavendish Laboratory. Dr. Cosslett pioneered research in x-ray optics and microanalysis and retained a close interest in all subject applications for this area of research, including physics, materials science, chemistry, and biology. X-Ray Optics and Microanalysis 1992 was held in his memory. At a special symposium, friends and colleagues reviewed the present status of research in x-ray optics and microanalysis. S.J. Pennycook of Oak Ridge National Laboratory, D.B. Williams of Lehigh University, J.A. Venables et al. of Arizona State University and Sussex University, and C. Jacobsen et al. of SUNY, Stony Brook are among the researchers whose papers are included in this volume.

This book has evolved by processes of selection and expansion from its predecessor, Practical Scanning Electron Microscopy (PSEM), published by Plenum Press in 1975. The interaction of the authors with students at the Short Course on Scanning Electron Microscopy and X-Ray Microanalysis held annually at Lehigh University has helped greatly in developing this textbook. The material has been chosen to provide a student with a general introduction to the techniques of scanning electron microscopy and x-ray microanalysis suitable for application in such fields as biology, geology, solid state physics, and materials science. Following the format of PSEM, this book gives the student a basic knowledge of (1) the user-controlled functions of the electron optics of the scanning electron microscope and electron microprobe, (2) the characteristics of electron-beam-sample inter actions, (3) image formation and interpretation, (4) x-ray spectrometry, and (5) quantitative x-ray microanalysis. Each of these topics has been updated and in most cases expanded over the material presented in PSEM in order to give the reader sufficient coverage to understand these topics and apply the information in the laboratory. Throughout the text, we have attempted to emphasize practical aspects of the techniques, describing those instru ment parameters which the microscopist can and must manipulate to obtain optimum information from the specimen. Certain areas in particular have been expanded in response to their increasing importance in the SEM field. Thus energy-dispersive x-ray spectrometry, which has undergone a tremendous surge in growth, is treated in substantial detail.