Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems
Title | Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems PDF eBook |
Author | Peter J. Hesketh |
Publisher | The Electrochemical Society |
Pages | 234 |
Release | 1997 |
Genre | Science |
ISBN | 9781566771320 |
Process Variations in Microsystems Manufacturing
Title | Process Variations in Microsystems Manufacturing PDF eBook |
Author | Michael Huff |
Publisher | Springer Nature |
Pages | 531 |
Release | 2020-04-09 |
Genre | Technology & Engineering |
ISBN | 3030405605 |
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.
Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems
Title | Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems PDF eBook |
Author | Denise Denton |
Publisher | The Electrochemical Society |
Pages | 376 |
Release | 1995 |
Genre | Science |
ISBN | 9781566771238 |
The Cumulative Book Index
Title | The Cumulative Book Index PDF eBook |
Author | |
Publisher | |
Pages | 2362 |
Release | 1998 |
Genre | American literature |
ISBN |
A world list of books in the English language.
Materials & Process Integration for MEMS
Title | Materials & Process Integration for MEMS PDF eBook |
Author | Francis E. H. Tay |
Publisher | Springer Science & Business Media |
Pages | 302 |
Release | 2013-06-29 |
Genre | Technology & Engineering |
ISBN | 1475757913 |
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.
Opportunities in Biotechnology for Future Army Applications
Title | Opportunities in Biotechnology for Future Army Applications PDF eBook |
Author | National Research Council |
Publisher | National Academies Press |
Pages | 118 |
Release | 2001-06-11 |
Genre | Science |
ISBN | 0309170737 |
This report surveys opportunities for future Army applications in biotechnology, including sensors, electronics and computers, materials, logistics, and medical therapeutics, by matching commercial trends and developments with enduring Army requirements. Several biotechnology areas are identified as important for the Army to exploit, either by direct funding of research or by indirect influence of commercial sources, to achieve significant gains in combat effectiveness before 2025.
Scanning Probe Techniques for Materials Characterization at Nanometer Scale
Title | Scanning Probe Techniques for Materials Characterization at Nanometer Scale PDF eBook |
Author | Douglas C. Hansen |
Publisher | The Electrochemical Society |
Pages | 224 |
Release | 2001 |
Genre | Science |
ISBN | 9781566773027 |