Low and High Dielectric Constant Materials
Title | Low and High Dielectric Constant Materials PDF eBook |
Author | Rajendra Singh |
Publisher | The Electrochemical Society |
Pages | 242 |
Release | 2000 |
Genre | Technology & Engineering |
ISBN | 9781566772297 |
Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials
Title | Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials PDF eBook |
Author | Hazara S. Rathore |
Publisher | The Electrochemical Society |
Pages | 278 |
Release | 1997 |
Genre | Science |
ISBN | 9781566771351 |
Proceedings of the Second International Symposium on Diamond Materials
Title | Proceedings of the Second International Symposium on Diamond Materials PDF eBook |
Author | A. J. Purdes |
Publisher | |
Pages | 698 |
Release | 1991 |
Genre | Diamond thin films |
ISBN |
Low and High Dielectric Constant Materials
Title | Low and High Dielectric Constant Materials PDF eBook |
Author | Mark J. Lododa |
Publisher | The Electrochemical Society |
Pages | 260 |
Release | 2000 |
Genre | Technology & Engineering |
ISBN |
Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arranged in sections on low and high dielectric constant materials, covering topics such as ammonia plasma passivation effects on properties of post-CMP low-k HSQ, characterization of ashing effects on low-k dielectric films, and electron beam curing of thin film polymer dielectrics. Other subjects include characterization of high-k dielectrics using the non-contact surface charge profiler method, and processing effects and electrical evaluation of ZrO2 formed by RTP oxidation of Zr. Loboda is affiliated with Dow Corning Corporation. c. Book News Inc.
Proceedings
Title | Proceedings PDF eBook |
Author | International Conference on Properties and Applications of Dielectric Materials |
Publisher | |
Pages | |
Release | 1988 |
Genre | |
ISBN |
Gate Dielectric Integrity
Title | Gate Dielectric Integrity PDF eBook |
Author | Dinesh C. Gupta |
Publisher | ASTM International |
Pages | 172 |
Release | 2000 |
Genre | Dielectrics |
ISBN | 0803126158 |
Annotation Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include methods, protocols, and reliability assessment as related to dielectric integrity. Papers are organized in sections on concepts, thin gate dielectrics, characterization and applications, and standardization. There is also a section summarizing panel discussions. Gupta is affiliated with Mitsubishi Silicon America. Brown is affiliated with Texas Instruments Inc. Annotation copyrighted by Book News, Inc., Portland, OR.
Physics and Technology of High-k Gate Dielectrics II
Title | Physics and Technology of High-k Gate Dielectrics II PDF eBook |
Author | Samares Kar |
Publisher | The Electrochemical Society |
Pages | 512 |
Release | 2004 |
Genre | Science |
ISBN | 9781566774055 |
"This volume is the proceedings of The Second International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues ... and was held during [the] 204th Meeting [of the Electrochemical Society] ..."--P. v.