Plasma Processing XIII
Title | Plasma Processing XIII PDF eBook |
Author | G. S. Mathad |
Publisher | The Electrochemical Society |
Pages | 408 |
Release | 2000 |
Genre | Plasma etching |
ISBN | 9781566772716 |
Fundamental Electron Interactions with Plasma Processing Gases
Title | Fundamental Electron Interactions with Plasma Processing Gases PDF eBook |
Author | Loucas G. Christophorou |
Publisher | Springer Science & Business Media |
Pages | 791 |
Release | 2012-12-06 |
Genre | Science |
ISBN | 1441989714 |
This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6.
Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
Title | Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing PDF eBook |
Author | M. Meyyappan |
Publisher | The Electrochemical Society |
Pages | 644 |
Release | 1995 |
Genre | Technology & Engineering |
ISBN | 9781566770965 |
Proceedings of the 8th Pacific Rim International Conference on Advanced Materials and Processing (PRICM-8)
Title | Proceedings of the 8th Pacific Rim International Conference on Advanced Materials and Processing (PRICM-8) PDF eBook |
Author | FernD.S. Marquis |
Publisher | Springer |
Pages | 3431 |
Release | 2017-03-21 |
Genre | Technology & Engineering |
ISBN | 3319487647 |
PRICM-8 features the most prominent and largest-scale interactions in advanced materials and processing in the Pacific Rim region. The conference is unique in its intrinsic nature and architecture which crosses many traditional discipline and cultural boundaries. This is a comprehensive collection of papers from the 15 symposia presented at this event.
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
Title | Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing PDF eBook |
Author | M. Meyyappan |
Publisher | The Electrochemical Society |
Pages | 366 |
Release | 1997 |
Genre | Technology & Engineering |
ISBN | 9781566771368 |
Proceedings of the 8th International Conference on Space Science and Communication
Title | Proceedings of the 8th International Conference on Space Science and Communication PDF eBook |
Author | Mohammad Tariqul Islam |
Publisher | Springer Nature |
Pages | 433 |
Release | |
Genre | |
ISBN | 9819701422 |
Proceedings of 19th International Conference on Food Processing & Technology 2017
Title | Proceedings of 19th International Conference on Food Processing & Technology 2017 PDF eBook |
Author | ConferenceSeries |
Publisher | ConferenceSeries |
Pages | 160 |
Release | |
Genre | |
ISBN |
October 23-25, 2017 Paris, France Key Topics: Food Science & Technology: Tools, Techniques and Instrumentation, Food Processing, Preservation and Packaging, Food and Nutrition, Food Microbes: Probiotics and Functional Foods, The Chemistry of Food Ingredients, Food Security: The Rising Crisis and Its Manangement, Food Public Health & Hygene, Food Industry and Health Hazard, Medical Foods: Enteral Nutrient Solution, Food Safety: Prevention and Control, Diary Food and its Commercial Future, Food Waste Management, Food Adultration: Laws policy and governance, Food Marketing and Economics, Baby Food and its Future Potential, Food Farming and Machinery, Food Psychology,