Precursors for Metal-organic Chemical Vapor Deposition of Thin Films
Title | Precursors for Metal-organic Chemical Vapor Deposition of Thin Films PDF eBook |
Author | Dan R. Denomme |
Publisher | |
Pages | 67 |
Release | 2012 |
Genre | |
ISBN |
Precursor Chemistry of Advanced Materials
Title | Precursor Chemistry of Advanced Materials PDF eBook |
Author | Roland A. Fischer |
Publisher | Springer Science & Business Media |
Pages | 240 |
Release | 2005-09-29 |
Genre | Science |
ISBN | 9783540016052 |
Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new routes for designing and synthesizing new precursors as well as the application of established molecular precursors to derive tuneable materials for technological demands. With regard to the precursor chemistry, a most detailed understanding of the mechanistic complexity of materials formation from molecular precursors is very important for further development of new processes and advanced materials. To emphasize and stimulate research in these areas, this volume comprises a selection of case studies covering various key-aspects of the interplay of precursor chemistry with the process conditions of materials formation, particularly looking at the similarities and differences of CVD, ALD and nanoparticle synthesis, e.g. colloid chemistry, involving tailored molecular precursors.
Precursors for Metal Organic Chemical Vapor Deposition (MOCVD) of ZrO_1tn2 and HfO_1tn2 Thin Films as Gate Dielectrics in Complementary Metal Oxide Semiconductor (CMOS) Devices
Title | Precursors for Metal Organic Chemical Vapor Deposition (MOCVD) of ZrO_1tn2 and HfO_1tn2 Thin Films as Gate Dielectrics in Complementary Metal Oxide Semiconductor (CMOS) Devices PDF eBook |
Author | |
Publisher | |
Pages | |
Release | 2005 |
Genre | |
ISBN |
I. Synthesis of Metal-organic Chemical Vapor Deposition Precursors and Their Use in Oxide Thin Film Depositions
Title | I. Synthesis of Metal-organic Chemical Vapor Deposition Precursors and Their Use in Oxide Thin Film Depositions PDF eBook |
Author | Seigi Suh |
Publisher | |
Pages | 292 |
Release | 1996 |
Genre | Chemical vapor deposition |
ISBN |
Chemical Vapour Deposition
Title | Chemical Vapour Deposition PDF eBook |
Author | Anthony C. Jones |
Publisher | Royal Society of Chemistry |
Pages | 600 |
Release | 2009 |
Genre | Science |
ISBN | 0854044655 |
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket
Synthesis and Characterization of Precursors for Chemical Vapor Deposition of Metal Oxide Thin Films
Title | Synthesis and Characterization of Precursors for Chemical Vapor Deposition of Metal Oxide Thin Films PDF eBook |
Author | May Nyman |
Publisher | |
Pages | 354 |
Release | 1992 |
Genre | Metallic films |
ISBN |
Molecular Precursors for Solid State Materials
Title | Molecular Precursors for Solid State Materials PDF eBook |
Author | Daniel Gerard Colombo |
Publisher | |
Pages | 826 |
Release | 1999 |
Genre | |
ISBN |