Precursors for Metal Organic Chemical Vapor Deposition (MOCVD) of ZrO_1tn2 and HfO_1tn2 Thin Films as Gate Dielectrics in Complementary Metal Oxide Semiconductor (CMOS) Devices

Precursors for Metal Organic Chemical Vapor Deposition (MOCVD) of ZrO_1tn2 and HfO_1tn2 Thin Films as Gate Dielectrics in Complementary Metal Oxide Semiconductor (CMOS) Devices
Title Precursors for Metal Organic Chemical Vapor Deposition (MOCVD) of ZrO_1tn2 and HfO_1tn2 Thin Films as Gate Dielectrics in Complementary Metal Oxide Semiconductor (CMOS) Devices PDF eBook
Author
Publisher
Pages
Release 2005
Genre
ISBN

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Precursors for Metal-organic Chemical Vapor Deposition of Thin Films

Precursors for Metal-organic Chemical Vapor Deposition of Thin Films
Title Precursors for Metal-organic Chemical Vapor Deposition of Thin Films PDF eBook
Author Dan R. Denomme
Publisher
Pages 67
Release 2012
Genre
ISBN

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Molecular Precursors for Solid State Materials

Molecular Precursors for Solid State Materials
Title Molecular Precursors for Solid State Materials PDF eBook
Author Daniel Gerard Colombo
Publisher
Pages 826
Release 1999
Genre
ISBN

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Metal-organic Chemical Vapor Deposition of Indium Oxide Based Transparent Conducting Oxide Thin Films

Metal-organic Chemical Vapor Deposition of Indium Oxide Based Transparent Conducting Oxide Thin Films
Title Metal-organic Chemical Vapor Deposition of Indium Oxide Based Transparent Conducting Oxide Thin Films PDF eBook
Author Jun Ni
Publisher
Pages
Release 2005
Genre
ISBN

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Four novel diamine adducts of bis(hexafluoroacetylacetonato)zinc [Zn(hfa)2·(diamine)] can be synthesized in a single step reaction. Single crystal x-ray diffraction studies reveal monomeric, six-coordinate structures. The thermal stabilities and vapor phase transport properties of these complexes are considerably greater than those of conventional solid/liquid zinc metal-organic chemical vapor deposition (MOCVD) precursors. Of the four complexes, bis(1,1,1,5,5,5-hexafluoro-2,4-pentadionato)(N,N '-diethylethylenediamine)zinc [Zn(hfa)2 ( N,N'-DEA)], is particularly effective in the growth of thin films of the transparent conducting oxide Zn- and Sn-doped In2O3 (ZITO) due to its superior volatility and low melting point of 64°C.

Metalorganic Vapor Phase Epitaxy (MOVPE)

Metalorganic Vapor Phase Epitaxy (MOVPE)
Title Metalorganic Vapor Phase Epitaxy (MOVPE) PDF eBook
Author Stuart Irvine
Publisher John Wiley & Sons
Pages 907
Release 2019-09-04
Genre Technology & Engineering
ISBN 1119313031

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Systematically discusses the growth method, material properties, and applications for key semiconductor materials MOVPE is a chemical vapor deposition technique that produces single or polycrystalline thin films. As one of the key epitaxial growth technologies, it produces layers that form the basis of many optoelectronic components including mobile phone components (GaAs), semiconductor lasers and LEDs (III-Vs, nitrides), optical communications (oxides), infrared detectors, photovoltaics (II-IV materials), etc. Featuring contributions by an international group of academics and industrialists, this book looks at the fundamentals of MOVPE and the key areas of equipment/safety, precursor chemicals, and growth monitoring. It covers the most important materials from III-V and II-VI compounds to quantum dots and nanowires, including sulfides and selenides and oxides/ceramics. Sections in every chapter of Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications cover the growth of the particular materials system, the properties of the resultant material, and its applications. The book offers information on arsenides, phosphides, and antimonides; nitrides; lattice-mismatched growth; CdTe, MCT (mercury cadmium telluride); ZnO and related materials; equipment and safety; and more. It also offers a chapter that looks at the future of the technique. Covers, in order, the growth method, material properties, and applications for each material Includes chapters on the fundamentals of MOVPE and the key areas of equipment/safety, precursor chemicals, and growth monitoring Looks at important materials such as III-V and II-VI compounds, quantum dots, and nanowires Provides topical and wide-ranging coverage from well-known authors in the field Part of the Materials for Electronic and Optoelectronic Applications series Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications is an excellent book for graduate students, researchers in academia and industry, as well as specialist courses at undergraduate/postgraduate level in the area of epitaxial growth (MOVPE/ MOCVD/ MBE).

Metal-organic Chemical Vapor Deposition of Cerium Oxide, Gallium-indium-oxide, and Magnesium Oxide Thin Films

Metal-organic Chemical Vapor Deposition of Cerium Oxide, Gallium-indium-oxide, and Magnesium Oxide Thin Films
Title Metal-organic Chemical Vapor Deposition of Cerium Oxide, Gallium-indium-oxide, and Magnesium Oxide Thin Films PDF eBook
Author Nikki Lynn Edleman
Publisher
Pages
Release 2002
Genre
ISBN

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The synthesis and characterization of a new magnesium MOCVD precursor, Mg(dpm)2(TMEDA) is detailed. It is shown that the donating ligand TMEDA prevents oligomerization and subsequent volatility depression as observed in the commonly used [Mg(dpm)2]2. The superiority of Mg(dpm)2(TMEDA) as an MOCVD precursor is explicitly demonstrated by growth of epitaxial MgO thin films on single-crystal SrTiO3 substrates.

SrO-HfO2 Gate Dielectrics by Metal Organic Chemical Vapor Deposition (MOCVD)

SrO-HfO2 Gate Dielectrics by Metal Organic Chemical Vapor Deposition (MOCVD)
Title SrO-HfO2 Gate Dielectrics by Metal Organic Chemical Vapor Deposition (MOCVD) PDF eBook
Author Dan Yu
Publisher
Pages 160
Release 2006
Genre
ISBN

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