Plasma-parameter Dependence of Thin-oxide Charging Damage to Microelectronic Test Structures in an Electron-cyclotron-resonance Plasma

Plasma-parameter Dependence of Thin-oxide Charging Damage to Microelectronic Test Structures in an Electron-cyclotron-resonance Plasma
Title Plasma-parameter Dependence of Thin-oxide Charging Damage to Microelectronic Test Structures in an Electron-cyclotron-resonance Plasma PDF eBook
Author James Benedict Friedmann
Publisher
Pages 692
Release 1995
Genre
ISBN

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Study of SiO2 to Si Etching Selectivity in High Density, Low Pressure Fluorocarbon Plasmas

Study of SiO2 to Si Etching Selectivity in High Density, Low Pressure Fluorocarbon Plasmas
Title Study of SiO2 to Si Etching Selectivity in High Density, Low Pressure Fluorocarbon Plasmas PDF eBook
Author Karen Hildegard Ralston Kirmse
Publisher
Pages 298
Release 1996
Genre
ISBN

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Digest of Technical Papers

Digest of Technical Papers
Title Digest of Technical Papers PDF eBook
Author
Publisher
Pages 1020
Release 2003
Genre Actuators
ISBN

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Dissertation Abstracts International

Dissertation Abstracts International
Title Dissertation Abstracts International PDF eBook
Author
Publisher
Pages 780
Release 1996
Genre Dissertations, Academic
ISBN

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Microelectronic Processes, Sensors, and Controls

Microelectronic Processes, Sensors, and Controls
Title Microelectronic Processes, Sensors, and Controls PDF eBook
Author James Bondur
Publisher
Pages 480
Release 1994
Genre Technology & Engineering
ISBN

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Catalog of National Bureau of Standards Publications, 1966-1976

Catalog of National Bureau of Standards Publications, 1966-1976
Title Catalog of National Bureau of Standards Publications, 1966-1976 PDF eBook
Author United States. National Bureau of Standards. Technical Information and Publications Division
Publisher
Pages 854
Release 1978
Genre Government publications
ISBN

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Catalog of National Bureau of Standards Publications, 1966-1976: pt. 1-2. Key word index

Catalog of National Bureau of Standards Publications, 1966-1976: pt. 1-2. Key word index
Title Catalog of National Bureau of Standards Publications, 1966-1976: pt. 1-2. Key word index PDF eBook
Author United States. National Bureau of Standards
Publisher
Pages 844
Release 1978
Genre Government publications
ISBN

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