Plasma-parameter Dependence of Thin-oxide Charging Damage to Microelectronic Test Structures in an Electron-cyclotron-resonance Plasma
Title | Plasma-parameter Dependence of Thin-oxide Charging Damage to Microelectronic Test Structures in an Electron-cyclotron-resonance Plasma PDF eBook |
Author | James Benedict Friedmann |
Publisher | |
Pages | 692 |
Release | 1995 |
Genre | |
ISBN |
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Study of SiO2 to Si Etching Selectivity in High Density, Low Pressure Fluorocarbon Plasmas
Title | Study of SiO2 to Si Etching Selectivity in High Density, Low Pressure Fluorocarbon Plasmas PDF eBook |
Author | Karen Hildegard Ralston Kirmse |
Publisher | |
Pages | 298 |
Release | 1996 |
Genre | |
ISBN |
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Digest of Technical Papers
Title | Digest of Technical Papers PDF eBook |
Author | |
Publisher | |
Pages | 1020 |
Release | 2003 |
Genre | Actuators |
ISBN |
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Dissertation Abstracts International
Title | Dissertation Abstracts International PDF eBook |
Author | |
Publisher | |
Pages | 780 |
Release | 1996 |
Genre | Dissertations, Academic |
ISBN |
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Microelectronic Processes, Sensors, and Controls
Title | Microelectronic Processes, Sensors, and Controls PDF eBook |
Author | James Bondur |
Publisher | |
Pages | 480 |
Release | 1994 |
Genre | Technology & Engineering |
ISBN |
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Catalog of National Bureau of Standards Publications, 1966-1976
Title | Catalog of National Bureau of Standards Publications, 1966-1976 PDF eBook |
Author | United States. National Bureau of Standards. Technical Information and Publications Division |
Publisher | |
Pages | 854 |
Release | 1978 |
Genre | Government publications |
ISBN |
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Catalog of National Bureau of Standards Publications, 1966-1976: pt. 1-2. Key word index
Title | Catalog of National Bureau of Standards Publications, 1966-1976: pt. 1-2. Key word index PDF eBook |
Author | United States. National Bureau of Standards |
Publisher | |
Pages | 844 |
Release | 1978 |
Genre | Government publications |
ISBN |
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