Plasma-Enhanced CVD (Chemical Vapor Deposition): Oxides, Nitrides Transition Metals, and Transition Metal Silicides
Title | Plasma-Enhanced CVD (Chemical Vapor Deposition): Oxides, Nitrides Transition Metals, and Transition Metal Silicides PDF eBook |
Author | D. W. Hess |
Publisher | |
Pages | 11 |
Release | 1984 |
Genre | |
ISBN |
Plasma-enhanced chemical vapor deposition (PECVD) of thin films has generated considerable interest in recent years. Much of this interest stems from the ability of high energy electrons in rf glow discharges (plasmas) to break chemical bonds and thereby promote chemical reactions at or near room temperature. Such considerations are particularly important when depositing films onto substrates which cannot withstand high temperatures. A further advantage, however, is that the highly reactive plasma atmosphere can result in the formation of materials with unique chemical, physical, and electrical properties. In this paper, the plasma-enhanced deposition of oxide, nitride, transition metal, and transition metal silicide films will be discussed. Emphasis will be placed upon the chemistry occurring in the glow discharge, and on the manner in which this chemistry controls the resulting film properties.
Research in Progress
Title | Research in Progress PDF eBook |
Author | |
Publisher | |
Pages | 604 |
Release | 1984 |
Genre | Military research |
ISBN |
Laser Microfabrication
Title | Laser Microfabrication PDF eBook |
Author | Daniel J. Ehrlich |
Publisher | Elsevier |
Pages | 602 |
Release | 1989-06-21 |
Genre | Technology & Engineering |
ISBN | 0080918026 |
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
The Chemistry of Metal CVD
Title | The Chemistry of Metal CVD PDF eBook |
Author | Toivo T. Kodas |
Publisher | John Wiley & Sons |
Pages | 562 |
Release | 2008-09-26 |
Genre | Technology & Engineering |
ISBN | 3527615849 |
High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) compounds is covered. The synthesis and properties of the precursors, the growth process, morphology, quality and adhesion of the resulting films as well as laser- assisted, ion- assisted and plasma-assisted methods are discussed. Present applications and prospects for future developments are summarized. With ca. 1000 references and a glossary, this book is a unique source of in-depth information. It is indispensable for chemists, physicists, engineers and materials scientists working with metal- coating processes and technologies. From Reviews: 'I highly recommend this book to anyone interested in learning more about the chemistry of metal CVD.' J. Am Chem. Soc.
Chemical Vapor Deposition (CVD) of Transition Metal and Metal Oxide Thin Films
Title | Chemical Vapor Deposition (CVD) of Transition Metal and Metal Oxide Thin Films PDF eBook |
Author | |
Publisher | |
Pages | |
Release | 1999 |
Genre | |
ISBN |
Energy Research Abstracts
Title | Energy Research Abstracts PDF eBook |
Author | |
Publisher | |
Pages | 1430 |
Release | 1984 |
Genre | Power resources |
ISBN |
Semiannual, with semiannual and annual indexes. References to all scientific and technical literature coming from DOE, its laboratories, energy centers, and contractors. Includes all works deriving from DOE, other related government-sponsored information, and foreign nonnuclear information. Arranged under 39 categories, e.g., Biomedical sciences, basic studies; Biomedical sciences, applied studies; Health and safety; and Fusion energy. Entry gives bibliographical information and abstract. Corporate, author, subject, report number indexes.
Chemical Vapour Deposition
Title | Chemical Vapour Deposition PDF eBook |
Author | Anthony C. Jones |
Publisher | Royal Society of Chemistry |
Pages | 600 |
Release | 2009 |
Genre | Science |
ISBN | 0854044655 |
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket