Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane
| Title | Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane PDF eBook |
| Author | Todd Alan Brooks |
| Publisher | |
| Pages | 286 |
| Release | 1988 |
| Genre | |
| ISBN |
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Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide and Silicon Nitride
| Title | Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide and Silicon Nitride PDF eBook |
| Author | William H. Ritchie |
| Publisher | |
| Pages | 118 |
| Release | 1986 |
| Genre | Plasma (Ionized gases) |
| ISBN |
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Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride and Oxynitride Films Using Disilane as Silicon Source
| Title | Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride and Oxynitride Films Using Disilane as Silicon Source PDF eBook |
| Author | Giridhar Nallapati |
| Publisher | |
| Pages | 108 |
| Release | 1999 |
| Genre | |
| ISBN |
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Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films
| Title | Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films PDF eBook |
| Author | Kevin John Grannen |
| Publisher | |
| Pages | |
| Release | 1994 |
| Genre | |
| ISBN |
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Plasma Enhanced Chemical Vapor Depostion of Fluorinated Silicon Nitride
| Title | Plasma Enhanced Chemical Vapor Depostion of Fluorinated Silicon Nitride PDF eBook |
| Author | Rhett Eugene Livengood |
| Publisher | |
| Pages | 304 |
| Release | 1987 |
| Genre | |
| ISBN |
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Deposition of Fluorinated Silicon Nitride Using Plasma Enhanced Chemical Vapor Deposition
| Title | Deposition of Fluorinated Silicon Nitride Using Plasma Enhanced Chemical Vapor Deposition PDF eBook |
| Author | Mohammad Ibrahim Khan |
| Publisher | |
| Pages | 334 |
| Release | 1990 |
| Genre | Plasma-enhanced chemical vapor deposition |
| ISBN |
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Modelling and Experimental Study of Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films
| Title | Modelling and Experimental Study of Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films PDF eBook |
| Author | Chue-san Yoo |
| Publisher | |
| Pages | 210 |
| Release | 1988 |
| Genre | |
| ISBN |
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