Plasma-enhanced Chemical Vapor Deposition of Boron Nitride
Title | Plasma-enhanced Chemical Vapor Deposition of Boron Nitride PDF eBook |
Author | Todd Hideo Yuzuriha |
Publisher | |
Pages | 320 |
Release | 1984 |
Genre | |
ISBN |
Deposition of Cubic Boron Nitride Thin Films by Supersonic D.C. Plasma-enhanced Chemical Vapor Deposition
Title | Deposition of Cubic Boron Nitride Thin Films by Supersonic D.C. Plasma-enhanced Chemical Vapor Deposition PDF eBook |
Author | Eric Runde |
Publisher | |
Pages | 122 |
Release | 2004 |
Genre | |
ISBN |
Parameters Affecting Deposition of Boron Nitride Films in a Microwave-assisted Plasma-enhanced Chemical Vapor Deposition Apparatus
Title | Parameters Affecting Deposition of Boron Nitride Films in a Microwave-assisted Plasma-enhanced Chemical Vapor Deposition Apparatus PDF eBook |
Author | Matthew A. Evanko |
Publisher | |
Pages | 124 |
Release | 1989 |
Genre | |
ISBN |
Carbide, Nitride and Boride Materials Synthesis and Processing
Title | Carbide, Nitride and Boride Materials Synthesis and Processing PDF eBook |
Author | A.W. Weimer |
Publisher | Springer Science & Business Media |
Pages | 675 |
Release | 2012-12-06 |
Genre | Technology & Engineering |
ISBN | 9400900716 |
Carbide, Nitride and Boride Materials Synthesis and Processing is a major reference text addressing methods for the synthesis of non-oxides. Each chapter has been written by an expert practising in the subject area, affiliated with industry, academia or government research, thus providing a broad perspective of information for the reader. The subject matter ranges from materials properties and applications to methods of synthesis including pre- and post-synthesis processing. Although most of the text is concerned with the synthesis of powders, chapters are included for other materials such as whiskers, platelets, fibres and coatings. Carbide, Nitride and Boride Materials Synthesis and Processing is a comprehensive overview of the subject and is suitable for practitioners in the industry as well as those looking for an introduction to the field. It will be of interest to chemical, mechanical and ceramic engineers, materials scientists and chemists in both university and industrial environments working on or with refractory carbides, nitrides and borides.
Handbook of Chemical Vapor Deposition
Title | Handbook of Chemical Vapor Deposition PDF eBook |
Author | Hugh O. Pierson |
Publisher | William Andrew |
Pages | 507 |
Release | 1999-09-01 |
Genre | Technology & Engineering |
ISBN | 0815517432 |
Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.
Synthesis and Properties of Boron Nitride
Title | Synthesis and Properties of Boron Nitride PDF eBook |
Author | J.J. Pouch |
Publisher | Trans Tech Publications Ltd |
Pages | 426 |
Release | 1991-01-01 |
Genre | Technology & Engineering |
ISBN | 3035704511 |
Boron nitride thin films can be deposited on different substrates using techniques such as plasma deposition, ion beam deposition and reactive sputter deposition.
Chemical Vapor Deposition Growth and Characterization of Two-Dimensional Hexagonal Boron Nitride
Title | Chemical Vapor Deposition Growth and Characterization of Two-Dimensional Hexagonal Boron Nitride PDF eBook |
Author | Roland Yingjie Tay |
Publisher | Springer |
Pages | 152 |
Release | 2018-06-20 |
Genre | Technology & Engineering |
ISBN | 9811088098 |
This thesis focuses on the growth of a new type of two-dimensional (2D) material known as hexagonal boron nitride (h-BN) using chemical vapor deposition (CVD). It also presents several significant breakthroughs in the authors’ understanding of the growth mechanism and development of new growth techniques, which are now well known in the field. Of particular importance is the pioneering work showing experimental proof that 2D crystals of h-BN can indeed be hexagonal in shape. This came as a major surprise to many working in the 2D field, as it had been generally assumed that hexagonal-shaped h-BN was impossible due to energy dynamics. Beyond growth, the thesis also reports on synthesis techniques that are geared toward commercial applications. Large-area aligned growth and up to an eightfold reduction in the cost of h-BN production are demonstrated. At present, all other 2D materials generally use h-BN as their dielectric layer and for encapsulation. As such, this thesis lays the cornerstone for using CVD 2D h-BN for this purpose.