Evaluates the latest scientific data on health effects of NOx measured in laboratory animals and exposed human populations and the effects of NOx on agricultural corps, forests and ecosystems, as well the NOx effects on visibility and non-biological materials. Other chapters describe the nature, sources, distribution, measurement and concentrations of NOx in the environment. Covers all pertinent literature through early 1993. Glossary of terms and symbols. Extensive bibliography. Charts, tables and graphs.

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.