This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments' digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal-silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense.

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

Optical Fiber Telecommunications V (A&B) is the fifth in a series that has chronicled the progress in the research and development of lightwave communications since the early 1970s. Written by active authorities from academia and industry, this edition not only brings a fresh look to many essential topics but also focuses on network management and services. Using high bandwidth in a cost-effective manner for the development of customer applications is a central theme. This book is ideal for R&D engineers and managers, optical systems implementers, university researchers and students, network operators, and the investment community. Volume (A) is devoted to components and subsystems, including: semiconductor lasers, modulators, photodetectors, integrated photonic circuits, photonic crystals, specialty fibers, polarization-mode dispersion, electronic signal processing, MEMS, nonlinear optical signal processing, and quantum information technologies. Volume (B) is devoted to systems and networks, including: advanced modulation formats, coherent systems, time-multiplexed systems, performance monitoring, reconfigurable add-drop multiplexers, Ethernet technologies, broadband access and services, metro networks, long-haul transmission, optical switching, microwave photonics, computer interconnections, and simulation tools. Biographical Sketches Ivan Kaminow retired from Bell Labs in 1996 after a 42-year career. He conducted seminal studies on electrooptic modulators and materials, Raman scattering in ferroelectrics, integrated optics, semiconductor lasers (DBR , ridge-waveguide InGaAsP and multi-frequency), birefringent optical fibers, and WDM networks. Later, he led research on WDM components (EDFAs, AWGs and fiber Fabry-Perot Filters), and on WDM local and wide area networks. He is a member of the National Academy of Engineering and a recipient of the IEEE/OSA John Tyndall, OSA Charles Townes and IEEE/LEOS Quantum Electronics Awards. Since 2004, he has been Adjunct Professor of Electrical Engineering at the University of California, Berkeley. Tingye Li retired from AT&T in 1998 after a 41-year career at Bell Labs and AT&T Labs. His seminal work on laser resonator modes is considered a classic. Since the late 1960s, He and his groups have conducted pioneering studies on lightwave technologies and systems. He led the work on amplified WDM transmission systems and championed their deployment for upgrading network capacity. He is a member of the National Academy of Engineering and a foreign member of the Chinese Academy of Engineering. He is a recipient of the IEEE David Sarnoff Award, IEEE/OSA John Tyndall Award, OSA Ives Medal/Quinn Endowment, AT&T Science and Technology Medal, and IEEE Photonics Award. Alan Willner has worked at AT&T Bell Labs and Bellcore, and he is Professor of Electrical Engineering at the University of Southern California. He received the NSF Presidential Faculty Fellows Award from the White House, Packard Foundation Fellowship, NSF National Young Investigator Award, Fulbright Foundation Senior Scholar, IEEE LEOS Distinguished Lecturer, and USC University-Wide Award for Excellence in Teaching. He is a Fellow of IEEE and OSA, and he has been President of the IEEE LEOS, Editor-in-Chief of the IEEE/OSA J. of Lightwave Technology, Editor-in-Chief of Optics Letters, Co-Chair of the OSA Science & Engineering Council, and General Co-Chair of the Conference on Lasers and Electro-Optics.