Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.

Results of measurements and conclusions derived from them constitute much of the technical information produced by the National Institute of Standards and Technology (NIST). In July 1992 the Director of NIST appointed an Ad Hoc Committee on Uncertainty Statements and charged it with recommending a policy on this important topic. The Committee concluded that the CIPM approach could be used to provide quantitative expression of measurement that would satisfy NIST¿s customers¿ requirements. NIST initially published a Technical Note on this issue in Jan. 1993. This 1994 edition addresses the most important questions raised by recipients concerning some of the points it addressed and some it did not. Illustrations.

This book provides an overview on current sustainable machining. Its chapters cover the concept in economic, social and environmental dimensions. It provides the reader with proper ways to handle several pollutants produced during the machining process. The book is useful on both undergraduate and postgraduate levels and it is of interest to all those working with manufacturing and machining technology.