This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope (NSOM) is also given. The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes. Provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers Explains many practical applications of scanning optical and interference microscopy in such diverse fields as biology and semiconductor metrology Discusses in theoretical terms the origin of the improved depth and transverse resolution of scanning optical and interference microscopes with emphasis on the practical results of the theoretical calculations Considers the practical aspects of building a confocal scanning or interference microscope and explores some of the design tradeoffs made for microscopes used in various applications Discusses the theory and design of near-field optical microscopes Explains phase imaging in the scanning optical and interference microscopes

The last few years have seen an upsurge of interest in the study of cells by optical microscopy. The advent of new techniques such as confocal microscopy and the availability of extremely sensitive digital imaging devices are revolutioniz-ing the field. A number of groups have developed new ways of making spectroscopic measurements at the microscopic level, accompanied by the introduction of appropriate sen-sor molecules for cellular assays. The aim of this volume will be to bring together the various advances in order to provide the reader with an up-to-date account of what can now be achieved with modern optical microscopic methods.

Making a clear distinction is made between nano- and micro-mechanical testing for physical reasons, this monograph describes the basics and applications of the supermicroscopies AFM and SNOM, and of the nanomechanical testing on rough and technical natural surfaces in the submicron range down to a lateral resolution of a few nm. New or improved instrumentation, new physical laws and unforeseen new applications in all branches of natural sciences (around physics, chemistry, mineralogy, materials science, biology and medicine) and nanotechnology are covered as well as the sources for pitfalls and errors. It outlines the handling of natural and technical samples in relation to those of flat standard samples and emphasizes new special features. Pitfalls and sources of errors are clearly demonstrated as well as their efficient remedy when going from molecularly flat to rough surfaces. The academic or industrial scientist learns how to apply the principles for tackling their scientific or manufacturing tasks that include roughness far away from standard samples.

In 1987 the Electron Microscopy Society of America (EMSA) going to drive important scientific discoveries across wide areas under the leadership of J. P. Revel (Cal Tech) initiated a major of physiology, cellular biology and neurobiology. They had been program to present a discussion of recent advances in light looking for a forum in which they could advance the state of microscopy as part of the annual meeting. The result was three the art of confocal microscopy, alert manufacturers to the lim special LM sessions at the Milwaukee meeting in August 1988: itations of current instruments, and catalyze progress toward The LM Forum, organized by me, and Symposia on Confocal new directions in confocal instrument development. LM, organized by G. Schatten (Madison), and on Integrated These goals were so close to those of the EMSA project that Acoustic/LM/EM organized by C. Rieder (Albany). In addition, the two groups decided to join forces with EMSA to provide there was an optical micro-analysis session emphasizing Raman the organization and the venue for a Confocal Workshop and techniques, organized by the Microbeam Analysis Society, for NSF to provide the financial support for the speakers expenses a total of 40 invited and 30 contributed papers on optical tech and for the publication of extended abstracts.