Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.

Two exciting worlds of science and technology - the nano and micro dimensions. The former is a booming new field of research, the latter the established size range for electronics, and for mutual technological benefit and future commercialization, suitable junctions need to be found. Functional nanostructures such as DNA computers, sensors, neural interfaces, nanooptics or molecular electronics need to be wired to their 'bigger' surroundings. Coming from the opposite direction, microelectronics have experienced an unprecedented miniaturization drive in the last decade, pushing ever further down through the micro size scale towards submicron circuitry. Bringing these two worlds together is a new interdisciplinary challenge for scientists and engineers alike - recognized and substantially funded by the European Commission and other major project initiators worldwide. This book offers a wide range of information from technologies to materials and devices as well as from research to administrative know-how collected by the editors from renowned key members of the nano/micro community.

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. Sample Chapter(s). Chapter 1: Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy (3,320 KB). Contents: Atomic Force Microscope Lithography (N Kawasegi et al.); Nanowire Assembly and Integration (Z Gu & D H Gracias); Extreme Ultraviolet Lithography (H Kinoshita); Electron Projection Lithography (T Miura et al.); Electron Beam Direct Writing (K Yamazaki); Electron Beam Induced Deposition (K Mitsuishi); Focused Ion Beams and Interaction with Solids (T Ishitani et al.); Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques (K L Ekinci & J Brugger); and other papers. Readership: Researchers, professionals, and graduate students in the fields of nanoengineering and nanoscience.

blends materials, fabrication, and structure issues of developing nanobio devices in a single volume. treats major nanobio application areas such as drug delivery, molecular diagnostics, and imaging. chapters written by the leading researchers in the field.

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

This book describes the use of modern micro- and nanofabrication technologies to develop improved tools for stimulating and recording electrical activity in neuronal networks. It provides an overview of the different ways in which the “nano-world” can be beneficial for neuroscientists, including improvement of mechanical adhesion of cells on electrodes, tight-sealed extracellular recordings or intracellular approaches with strongly reduced invasiveness and tools for localized electrical or optical stimulation in optogenetics experiments. Specific discussion of fabrication strategies is included, to provide a comprehensive guide to develop micro and nanostructured tools for biological applications. A perspective on integrating these devices with state-of-the-art technologies for large-scale in vitro and in vivo experiments completes the picture of neuronal interfacing with micro- and nanostructures.