Microelectromechanical Systems (MEMS) is a rapidly growing technology that lends itself particularly well to optical applications. An example of an optical MEMS device is the piston-action mirror that modulates the phase of reflected light. The phase of reflected light can be varied using thermal or electrostatic actuation to control the position of the mirror. In previous research, a modulation method to control thermally actuated mirrors was developed. This thesis presents the development, implementation, fabrication, and testing of a complimentary metal oxide semiconductor (CMOS) controller capable of directly interfacing between a digital system, such as a computer, and an electrostatically actuated MEMS mirror device. The controller pulse width modulates a supply voltage to vary the power applied to the MEMS mirror device. The MEMS mirror device responds with negligible position ripple to the applied average power of the pulse width modulation signal. By varying the duty cycle of the pulse width modulation signal, the position of the mirror is varied. This controller can be adapted to control other electrostatically actuated devices using the design and methodology described in this thesis. The implementation of this controller is a step toward the monolithic integration of a MEMS deformable mirror array with CMOS control electronics.

Abstract: Spatial light modulators (SLM) are micromachined MEMS (micro-electro-mechanical-systems) devices that can modulate light by reflecting light rays at different phases. These devices when formed into a large-scale array can be used for high speed optical and secure optical communications by modulating the light rays' phase. With the advances in MEMS fabrication technology, it has become inexpensive to produce large scale minor arrays, which are more efficient than traditional LCD (liquid crystal display) based systems. The MEMS mirror arrays are fabricated on silicon substrates and there is a need to design the necessary electronics that control the operation of these minor arrays. The requirements of these electronic drivers have pushed towards the development of IC (Integrated Circuits) fabrication processes that allow operation at much higher voltages than traditional devices. These processes have made it possible to integrate electronic drivers together with MEMS devices on one substrate to form a compact and efficient system. In the past, MEMS mirror drivers were large in size and had limited functionality. During the last decade, various methods were developed to produce smaller and more proficient systems. The approach presented here led to a pixel design that is compact and scalable, which makes it suitable to form a large-scale array. In addition, the driver incorporates a linearization scheme that compensates for the non-linear relationship of minor deflection to the applied voltage, which is an inherent issue with an electrostatic- activated device. The challenges of making an integrated system of MEMS and IC are small area requirements, incorporation of low and high voltage devices, and high voltage switching techniques. In this dissertation, multiple development stages of a large scale SLM driver ranging from a simple 4 by 4 array to 160 by 160 are designed, built and tested. This work involved testing the possibility of integration at early stages leading to a functioning large scale integrated system of IC and MEMS devices.

This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines

This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection