Microwave Enhanced Chemical Vapor Deposition of Silicon Compound Thin Films and Their Characterization
Title | Microwave Enhanced Chemical Vapor Deposition of Silicon Compound Thin Films and Their Characterization PDF eBook |
Author | Madan Gopal |
Publisher | |
Pages | 252 |
Release | 1991 |
Genre | Protective coatings |
ISBN |
Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films
Title | Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films PDF eBook |
Author | Kevin John Grannen |
Publisher | |
Pages | |
Release | 1994 |
Genre | |
ISBN |
Remote Microwave-enhanced Chemical Vapor Deposition of Silicon-nitrogen (SixNy) Thin Films
Title | Remote Microwave-enhanced Chemical Vapor Deposition of Silicon-nitrogen (SixNy) Thin Films PDF eBook |
Author | Gary M. Gladysz |
Publisher | |
Pages | 96 |
Release | 1991 |
Genre | Protective coatings |
ISBN |
Thin Film Chemical Vapor Deposition in Electronics
Title | Thin Film Chemical Vapor Deposition in Electronics PDF eBook |
Author | Vladislav I︠U︡rʹevich Vasilʹev |
Publisher | Nova Science Publishers |
Pages | 0 |
Release | 2014 |
Genre | Chemical vapor deposition |
ISBN | 9781633211506 |
This monograph is a summary of equipment, methodology and thin film growth experience obtained by the author during his 30 years of research work in the field of Integrated Circuit (IC) device technology. The monograph is concerned with the analysis of different aspects of different types of inorganic thin films grown by Chemical Vapor Deposition (CVD) methods and dedicated to the use in IC technology and production. The author discusses the methodology issues of thin film CVD and the fundamentals of the chemical kinetics of thin film growth. The main core of this monograph is the analysis of thin film CVD kinetics features obtained using different types of reactors, chemical compounds, process conditions. The monograph covers a wide variety of CVD-related aspects: equipment analysis, chemical compound features, CVD process methodology analysis, CVD kinetic features and their quantitative characterization, implementation of obtained numerical equations for thin film step coverage and gap-fill issues, interrelation of the film properties and CVD process features, and CVD process classification. The author would like to highlight that all the data presented in this book has been experimentally obtained by a number of research groups. Most of the data has been double-checked and confirmed. Surely, some data could not be repeated because it was obtained a long time ago using some specific deposition tools and processes. Nevertheless, the author would like to stress that he considers this book as an attempt to create a whole view on the thin film CVD for IC device technology applications. In this regard, the author has tried to generalize a large amount of experimental data, selecting the most common features of the film growth, composition, structure, and properties.
Synthesis and Characterization of Silicon Dioxide Thin Films by Plasma Enhances Chemical Vapor Deposition from Diethylsilane and Nitrous Oxide
Title | Synthesis and Characterization of Silicon Dioxide Thin Films by Plasma Enhances Chemical Vapor Deposition from Diethylsilane and Nitrous Oxide PDF eBook |
Author | Lan Chen |
Publisher | |
Pages | 120 |
Release | 1995 |
Genre | Silicon dioxide films |
ISBN |
Plasma Enhanced Chemical Vapor Deposition of Thin Films and New Crystalline Model Compounds in the Systems Silicon-sulfur and Phosphorus-sulfur
Title | Plasma Enhanced Chemical Vapor Deposition of Thin Films and New Crystalline Model Compounds in the Systems Silicon-sulfur and Phosphorus-sulfur PDF eBook |
Author | Robert Ko Shibao |
Publisher | |
Pages | 392 |
Release | 1995 |
Genre | |
ISBN |
Silicon Thin Films Prepared by Plasma Enhanced Chemical Vapor Deposition
Title | Silicon Thin Films Prepared by Plasma Enhanced Chemical Vapor Deposition PDF eBook |
Author | Jean-Jacques J. Hajjar |
Publisher | |
Pages | 338 |
Release | 1989 |
Genre | |
ISBN |