This book is planned to publish with an objective to provide a state-of-art reference book in the area of microsensors for engineers, scientists, applied physicists and post-graduate students. Also the aim of the book is the continuous and timely dissemination of new and innovative research and developments in microsensors. This reference book is a collection of 13 chapters characterized in 4 parts: magnetic sensors, chemical, optical microsensors and applications. This book provides an overview of resonant magnetic field microsensors based on MEMS, optical microsensors, the main design and fabrication problems of miniature sensors of physical, chemical and biochemical microsensors, chemical microsensors with ordered nanostructures, surface-enhanced Raman scattering microsensors based on hybrid nanoparticles, etc. Several interesting applications area are also discusses in the book like MEMS gyroscopes for consumer and industrial applications, microsensors for non invasive imaging in experimental biology, a heat flux microsensor for direct measurements in plasma surface interactions and so on.

This book reviews the state of art in the field of chemical sensors for analyses of ionic or molecular species dissolved in liquid media, mainly in aqueous solutions. The transduction of such devices is based on chemical, biological and physical phenomena. The fundamental phenomena involved in these sensors are described in the different chapters by specialists having a good expertise in the field. Numerous recent bibliographic references are given. Most of the devices could be miniaturised using modern technologies allowing a fabrication on a large scale, for a mass production at low cost. Moreover, such devices could open the field of applications in a near future (environmental, biomedical, food industries, domotic and automotive applications etc.).

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).

This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

This book narrates the development of various biomimetic microelectromechanical systems (MEMS) sensors, such as pressure, flow, acceleration, chemical, and tactile sensors, that are inspired by sensing phenomena that exist in marine life. The research described in this book is multi-faceted and combines the expertise and understanding from diverse fields, including biomimetics, microfabrication, sensor engineering, MEMS design, nanotechnology, and material science. A series of chapters examine the design and fabrication of MEMS sensors that function on piezoresistive, piezoelectric, strain gauge, and chemical sensing principles. By translating nature-based engineering solutions to artificial man-made technology, we can find innovative solutions to critical problems.

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Devoted primarily to the many applications of microsensors, this text covers thermal, radiation, mechanical, magnetic, chemical and biological microsensors. Information is also provided on basic processing, interfacing and bus systems, microsensor array and intelligent sensors.