Microfabricated and Nanofabricated Systems for MEMS/NEMS 8
Title | Microfabricated and Nanofabricated Systems for MEMS/NEMS 8 PDF eBook |
Author | P. J. Hesketh |
Publisher | The Electrochemical Society |
Pages | 131 |
Release | 2008-10 |
Genre | Science |
ISBN | 1566776600 |
The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Microfabricated and Nanofabricated Systems for MEMS/NEMS 8¿, held during the PRiME 2008 meeting of The Electrochemical Society, in Honolulu, Hawaii, from October 12 to 17, 2008.
Microfabricated and Nanofabricated Systems for Mems/Nems 8
Title | Microfabricated and Nanofabricated Systems for Mems/Nems 8 PDF eBook |
Author | Electrochemical Society (Ecs) |
Publisher | |
Pages | 123 |
Release | 2009-02-04 |
Genre | Technology & Engineering |
ISBN | 9781605606651 |
Microfabricated and Nanofabricated Systems for MEMS/NEMS 12
Title | Microfabricated and Nanofabricated Systems for MEMS/NEMS 12 PDF eBook |
Author | P. Hesketh |
Publisher | |
Pages | |
Release | 2016 |
Genre | |
ISBN | 9781607687344 |
Microfabricated and Nanofabricated Systems for MEMS/NEMS 15
Title | Microfabricated and Nanofabricated Systems for MEMS/NEMS 15 PDF eBook |
Author | Sushanta K. Mitra |
Publisher | |
Pages | 75 |
Release | 2020 |
Genre | |
ISBN | 9781713819431 |
MEMS and NEMS
Title | MEMS and NEMS PDF eBook |
Author | Sergey Edward Lyshevski |
Publisher | CRC Press |
Pages | 461 |
Release | 2018-10-03 |
Genre | Technology & Engineering |
ISBN | 1420040510 |
The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.
Advanced MEMS/NEMS Fabrication and Sensors
Title | Advanced MEMS/NEMS Fabrication and Sensors PDF eBook |
Author | Zhuoqing Yang |
Publisher | Springer Nature |
Pages | 312 |
Release | 2021-10-12 |
Genre | Technology & Engineering |
ISBN | 303079749X |
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Micro and Nano Fabrication
Title | Micro and Nano Fabrication PDF eBook |
Author | Hans H. Gatzen |
Publisher | Springer |
Pages | 537 |
Release | 2015-01-02 |
Genre | Technology & Engineering |
ISBN | 3662443953 |
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.