This book collects selected papers from the 17th and 18th Annual Conference of the Chinese Society of Micro/Nano Technology (CSMNT2015 and CSMNT2016).The papers cover various fields, like Micro/Nano Transducer/Robot, Microfluidic Devices and Systems, Micro/Nano Fabrication & Measurement Technologies, Microfluidics and Nano Fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological/Nano Medicine, Packaging Technology. All the papers are written by Chinese researchers. From this book, you can have an overview of research of MEMS and nano technology in China. The reader can be researchers, graduate students, and engineers who are working in the field of MEMS and nano technology.

Nanotechnology is a 'catch-all' description of activities at the level of atoms and molecules that have applications in the real world. A nanometer is a billionth of a meter, about 1/80,000 of the diameter of a human hair, or 10 times the diameter of a hydrogen atom. Nanotechnology is now used in precision engineering, new materials development as well as in electronics; electromechanical systems as well as mainstream biomedical applications in areas such as gene therapy, drug delivery and novel drug discovery techniques. This book presents new and important breakthroughs in the field from around the world.

This book provides a comprehensive overview of how use of micro- and nanotechnology (MNT) has allowed major new advance in vaccine development research, and the challenges that immunologists face in making further progress. MNT allows the creation of particles that exploit the inherent ability of the human immune system to recognize small particles such as viruses and toxins. In combination with minimal protective epitope design, this permits the creation of immunogenic particles that stimulate a response against the targeted pathogen. The finely tuned response of the human immune system to small particles makes it unsurprising that many of the lead adjuvants and vaccine delivery systems currently under investigation are based on nanoparticles. - Provides a comprehensive and unparalleled overview of the role of micro- and nanotechnology in vaccine development - Allows researchers to quickly familiarize themselves with the broad spectrum of vaccines and how micro- and nanotechnologies are applied to their development - Includes a combination of overview chapters setting out general principles, and focused content dealing with specific vaccines, making it useful to readers from a variety of disciplines

Addressed to physical and chemical scientists and engineers, this book provides information on the design, manufacture, and assessment of components with critical dimensions or critical tolerances in the 0.1-100 nanometer range. Such tiny parts are now used in automobile engines, cassette players, and other common products. The 16 lectures presented are from an advanced vacation school on instrumentation and nanotechnology in Warwick, England, September 1990. Among the topics are signal processing, ultrasonic sensors, and nanoactuators for controlled displacements. .

Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. - Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications - Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM - Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

"Part of this book adapted from "Introduction aux nanosciences et aux nanotechnologies" published in France by Hermes Science/Lavoisier in 2006."