This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

The book starts with the fundamentals of triboelectric nanogenerators (TENGs), and continues through to fabrication technologies to achieve flexible and stretchable. Then self-powered flexible microsystems are introduced and application examples are presented, including TENG-based active sensors, TENG-powered actuators, artificial intelligence and integrated systems.

Flexibility and stretchability of electronics are crucial for next generation electronic devices that involve skin contact sensing and therapeutic actuation. This handbook provides a complete entrée to the field, from solid-state physics to materials chemistry, processing, devices, performance, and reliability testing, and integrated systems development. This work shows how microelectronics, signal processing, and wireless communications in the same circuitry are impacting electronics, healthcare, and energy applications. Key Features: • Covers the fundamentals to device applications, including solid-state and mechanics, chemistry, materials science, characterization techniques, and fabrication; • Offers a comprehensive base of knowledge for moving forward in this field, from foundational research to technology development; • Focuses on processing, characterization, and circuits and systems integration for device applications; • Addresses the basic physical properties and mechanics, as well as the nuts and bolts of reliability and performance analysis; • Discusses various technology applications, from printed electronics to logic and memory devices, sensors, actuators, displays, and energy storage and harvesting. This handbook will serve as the one-stop knowledge base for readership who are interested in flexible and stretchable electronics.

With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture -- and a peek into the future -- of micro-powered microsystems.

This book explores a key technology regarding the importance of connections via an Internet of Things network and how this helps us to easily communicate with others and gather information. Namely, what would happen if this suddenly became unavailable due to a shortage of power or electricity? Using thermoelectric generators is a viable solution as they use the heat around us to generate the much-needed electricity for our technological needs. This second volume on the challenges and prospects of thermoelectric generators covers the reliability and durability of thermoelectric materials and devices, the effect of microstructures on the understanding of electronic properties of complex materials, thermoelectric nanowires, the impact of chemical doping or magnetism, thermoelectric generation using the anomalous Nernst effect, phonon engineering, the current state and future prospects of thermoelectric technologies, transition metal silicides, and past, present and future applications of thermoelectrics.

MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics and communications, to improve the quality of human life. The sensors in MEMS gather information from the surrounding, which is then processed by the electronics for decision-making to control the environment. MEMS offers opportunities to miniaturize devices, integrate them with electronics and realize cost savings through batch fabrication. MEMS technology has enhanced many important applications in domains such as consumer electronics, biotechnology and communication and it holds great promise for continued contributions in the future. This book focuses on understanding the design, development and various applications of MEMS sensors.

With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture -- and a peek into the future -- of micro-powered microsystems.