Special Features: · All the authors of this book are stalwarts in their respective field and are key people in promoting the technology and subject.· This book emphasizes analytical and computational modeling. · It includes in-depth discussion of mechanics, coupled multi-physics, electronics, control, and scaling effects as well as finite element analysis. · Relating all of the above to particular examples of microelectromechanical systems (MEMS) and smart devices is a highlight of this book. · Complementing the modeling aspects, the book includes organized summaries of a variety of devices and systems, details of packaging and integration, and case-studies of representative devices. · Prior disciplinary background is not assumed in presenting the material.· Many worked-out examples, context-relevant problems within the chapters, and practice exercises are included in all chapters. It is thus suitable for self-study by practicing engineers and researchers in many disciplines.· Unavailability of a book that covers both micro and smart systems at the fundamental level.· Excellent pedagogy with:" 230+ Illustrations" 25 Tables" 100+ Exercise Questions" 45 Your Turn questions for students wanting to invest time in researching." About 50 Problems and Examples within chapters About The Book: This book essentially deals with the basics of microsystem technology and is intended principally as a textbook at the undergraduate level; however, it can also be used as background book at the postgraduate level. The book makes an effort to provide an introduction to smart materials and systems. The aim of this book is to present adequate modeling details so that readers can appreciate the analysis involved in microsystems (and to some extent, smart systems) and thereby enabling them to get an in-depth understanding about simulation and design. Therefore, the book will also be useful to practicing researchers in all branches of science and engineering, who might be interested in applications where they can use this technology. The book presents adequate details of modeling of microsystems as well as addresses their fabrication and integration.

Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.

The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications

With contributions from an internationally-renowned group of experts, this book uses a multidisciplinary approach to review recent developments in the field of smart sensor systems, covering important system and design aspects. It examines topics over the whole range of sensor technology from the theory and constraints of basic elements, physics and electronics, up to the level of application-orientated issues. Developed as a complementary volume to ‘Smart Sensor Systems’ (Wiley 2008), which introduces the basics of smart sensor systems, this volume focuses on emerging sensing technologies and applications, including: State-of-the-art techniques for designing smart sensors and smart sensor systems, including measurement techniques at system level, such as dynamic error correction, calibration, self-calibration and trimming. Circuit design for sensor systems, such as the design of precision instrumentation amplifiers. Impedance sensors, and the associated measurement techniques and electronics, that measure electrical characteristics to derive physical and biomedical parameters, such as blood viscosity or growth of micro-organisms. Complete sensor systems-on-a-chip, such as CMOS optical imagers and microarrays for DNA detection, and the associated circuit and micro-fabrication techniques. Vibratory gyroscopes and the associated electronics, employing mechanical and electrical signal amplification to enable low-power angular-rate sensing. Implantable smart sensors for neural interfacing in bio-medical applications. Smart combinations of energy harvesters and energy-storage devices for autonomous wireless sensors. Smart Sensor Systems: Emerging Technologies and Applications will greatly benefit final-year undergraduate and postgraduate students in the areas of electrical, mechanical and chemical engineering, and physics. Professional engineers and researchers in the microelectronics industry, including microsystem developers, will also find this a thorough and useful volume.

This book addresses the need to understand the development, use, construction, and operation of smart microgrids (SMG). Covering selected major operations of SMG like dynamic energy management, demand response, and demand dispatch, it describes the design and operational challenges of different microgrids and provides feasible solutions for systems. Smart Micro Grid presents communication technologies and governing standards used in developing communication networks for realizing various smart services and applications in microgrids. An architecture facilitating bidirectional communication for smart distribution/microgrid is brought out covering aspects of its design, development and validation. The book is aimed at graduate, research students and professionals in power, power systems, and power electronics. Features: • Covers a broad overview of the benefits, the design and operation requirements, standards and communication requirements for deploying microgrids in distribution systems. • Explores issues related to planning, expansion, operation, type of microgrids, interaction among microgrid and distribution networks, demand response, and the technical requirements for the communication network. • Discusses current standards and common practices to develop and operate microgrids. • Describes technical issues and requirements for operating microgrids. • Illustrates smart communication architecture and protocols.