The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

Special Features: · All the authors of this book are stalwarts in their respective field and are key people in promoting the technology and subject.· This book emphasizes analytical and computational modeling. · It includes in-depth discussion of mechanics, coupled multi-physics, electronics, control, and scaling effects as well as finite element analysis. · Relating all of the above to particular examples of microelectromechanical systems (MEMS) and smart devices is a highlight of this book. · Complementing the modeling aspects, the book includes organized summaries of a variety of devices and systems, details of packaging and integration, and case-studies of representative devices. · Prior disciplinary background is not assumed in presenting the material.· Many worked-out examples, context-relevant problems within the chapters, and practice exercises are included in all chapters. It is thus suitable for self-study by practicing engineers and researchers in many disciplines.· Unavailability of a book that covers both micro and smart systems at the fundamental level.· Excellent pedagogy with:" 230+ Illustrations" 25 Tables" 100+ Exercise Questions" 45 Your Turn questions for students wanting to invest time in researching." About 50 Problems and Examples within chapters About The Book: This book essentially deals with the basics of microsystem technology and is intended principally as a textbook at the undergraduate level; however, it can also be used as background book at the postgraduate level. The book makes an effort to provide an introduction to smart materials and systems. The aim of this book is to present adequate modeling details so that readers can appreciate the analysis involved in microsystems (and to some extent, smart systems) and thereby enabling them to get an in-depth understanding about simulation and design. Therefore, the book will also be useful to practicing researchers in all branches of science and engineering, who might be interested in applications where they can use this technology. The book presents adequate details of modeling of microsystems as well as addresses their fabrication and integration.

Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

This book provides an introduction to the complex field of ubiquitous computing Ubiquitous Computing (also commonly referred to as Pervasive Computing) describes the ways in which current technological models, based upon three base designs: smart (mobile, wireless, service) devices, smart environments (of embedded system devices) and smart interaction (between devices), relate to and support a computing vision for a greater range of computer devices, used in a greater range of (human, ICT and physical) environments and activities. The author details the rich potential of ubiquitous computing, the challenges involved in making it a reality, and the prerequisite technological infrastructure. Additionally, the book discusses the application and convergence of several current major and future computing trends. Key Features: Provides an introduction to the complex field of ubiquitous computing Describes how current technology models based upon six different technology form factors which have varying degrees of mobility wireless connectivity and service volatility: tabs, pads, boards, dust, skins and clay, enable the vision of ubiquitous computing Describes and explores how the three core designs (smart devices, environments and interaction) based upon current technology models can be applied to, and can evolve to, support a vision of ubiquitous computing and computing for the future Covers the principles of the following current technology models, including mobile wireless networks, service-oriented computing, human computer interaction, artificial intelligence, context-awareness, autonomous systems, micro-electromechanical systems, sensors, embedded controllers and robots Covers a range of interactions, between two or more UbiCom devices, between devices and people (HCI), between devices and the physical world. Includes an accompanying website with PowerPoint slides, problems and solutions, exercises, bibliography and further reading Graduate students in computer science, electrical engineering and telecommunications courses will find this a fascinating and useful introduction to the subject. It will also be of interest to ICT professionals, software and network developers and others interested in future trends and models of computing and interaction over the next decades.

Devoted primarily to the many applications of microsensors, this text covers thermal, radiation, mechanical, magnetic, chemical and biological microsensors. Information is also provided on basic processing, interfacing and bus systems, microsensor array and intelligent sensors.