How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.

How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.

Semiconductor Gas Sensors, Second Edition, summarizes recent research on basic principles, new materials and emerging technologies in this essential field. Chapters cover the foundation of the underlying principles and sensing mechanisms of gas sensors, include expanded content on gas sensing characteristics, such as response, sensitivity and cross-sensitivity, present an overview of the nanomaterials utilized for gas sensing, and review the latest applications for semiconductor gas sensors, including environmental monitoring, indoor monitoring, medical applications, CMOS integration and chemical warfare agents. This second edition has been completely updated, thus ensuring it reflects current literature and the latest materials systems and applications. - Includes an overview of key applications, with new chapters on indoor monitoring and medical applications - Reviews developments in gas sensors and sensing methods, including an expanded section on gas sensor theory - Discusses the use of nanomaterials in gas sensing, with new chapters on single-layer graphene sensors, graphene oxide sensors, printed sensors, and much more

Metal Oxide Nanostructures as Gas Sensing Devices explores the development of an integrated micro gas sensor that is based on advanced metal oxide nanostructures and is compatible with modern semiconductor fabrication technology. This sensor can then be used to create a compact, low-power, handheld device for analyzing air ambience.The book first c

The second edition of this book focuses on the synthesis, design, and application of semiconducting metal oxides as gas sensing materials, including the gas sensing mechanism, and modification methods for sensing materials, while also providing a comprehensive introduction to semiconductor gas sensing devices. As an essential part of IoT (Internet of things), gas sensors have shown great significance and promising prospects. Therefore, studies on functional mesoporous metal oxides, one of the most important gas sensing materials based on their unique Knudsen diffusion behavior and tailored pore structure, have increasingly attracted attention from various disciplines. The book offers a valuable reference guide to metal oxide gas sensing materials for undergraduate and graduate students alike. It will also benefit all researchers who are involved in synthesis and gas sensing of metal oxides nanomaterials with relevant frontier theories and concepts. Engineers working on research and development of semiconductor gas sensors will also find some new ideas for sensor design.

An overview of the current state of nanotechnology-based devices with applications in environmental science, focusing on nanomaterials and polymer nanocomposites. The handbook pays special attention to those nanotechnology-based approaches that promise easier, faster and cheaper processes in environmental monitoring and remediation. Furthermore, it presents up-to-date information on the economics, toxicity and regulations related to nanotechnology in detail. The book closes with a look at the role of nanotechnology for a green and sustainable future. With its coverage of existing and soon-to-be-realized devices this is an indispensable reference for both academic and corporate R&D.

This book focuses on the applications of nanomaterials in the fabrication of gas sensors. It covers recent developments of different materials used to design gas sensors, such as conducting polymers, semiconductors, as well as layered and nanosized materials. The widespread applications of various gas sensors for the detection of toxic gases are also discussed. The book provides a concise but thorough coverage of nanomaterials applications and utilization in gas sensors. In addition, it overviews recent developments in and the fabrication of gas sensors and their attributes for a broad audience, including beginners, graduate students, and specialists in both academic and industrial sectors.