A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Volume is indexed by Thomson Reuters BCI (WoS). Measurement, rigorously defined as ‘ascertaining the size, amount or degree of a measurand by instrumental comparison with a standard unit or by indirect calculation based upon theory’, is what makes science and technology different to imagination. Measurement is essential in industry, commerce and daily life. In the manufacturing industry in particular, measurement and instrumentation technology play increasingly important roles not only in the traditional field of manufacturing but also in the new fields of micro/nano technology and bioengineering. This book presents recent advances in the use of measurement and instrumentation in the manufacturing industry. A wide range of topics are covered including: micro/nano-metrology,precision measurements,online and in-process measurements,surface metrology,optical metrology and image processing,bio-measurement, sensor technology,intelligent measurement and instrumentation,uncertainty, traceability and calibration and signal-processing algorithms.

Selected, peer reviewed papers from the Second International Conference on Advances in Materials and Manufacturing Processes (ICAMMP 2011), December 16-18, 2011, Guilin, China

The requirements of high precision and of high-quality components and devices in meeting the needs of modern industry and society in disciplines such as semiconductors, optics, nanotechnology, MEMS, manufacturing, biomedical and environmental engineering, make measurement technology and intelligent instruments (which sense, measure and report), more important than ever, and essential for the rapid development of information technology.