VLSI Electronics: Microstructure Science, Volume 6: Materials and Process Characterization addresses the problem of how to apply a broad range of sophisticated materials characterization tools to materials and processes used for development and production of very large scale integration (VLSI) electronics. This book discusses the various characterization techniques, such as Auger spectroscopy, secondary ion mass spectroscopy, X-ray topography, transmission electron microscopy, and spreading resistance. The systematic approach to the technologies of VLSI electronic materials and device manufacture are also considered. This volume is beneficial to materials scientists, chemists, and engineers who are commissioned with the responsibility of developing and implementing the production of materials and devices to support the VLSI era.

The proceedings of ALTECH 2009 address recent developments and applications of analytical techniques for semiconductor materials, processes and devices. The papers comprise techniques of elemental and structural analysis for bulk and surface impurities and defects, thin films as well as dopants in ultra-shallow junctions.

This book presents recent developments in the coating processes, sub processes and emphasizes on processes with the potential to improve performance quality and reproducibility. The book demonstrates how application methods, environmental factors, and chemical interactions affect each surface coating's performance. In addition, it provides analysis of latest polymers, carbon resins, high-temperature materials used for coatings and describes the development, chemical and physical properties, synthesis, polymerization, commercial uses and characteristics for each raw material and coating. Characterization techniques to solve the coating problems are also presented, as well as optimization studies to identify the critical coating parameters to ensure a robust process.

This book starts with an extended introductory treatise on the fundamentals before moving on to a detailed description of the new methods of purification of transition metals and rare earth metals.