Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching
| Title | Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching PDF eBook |
| Author | Jeffrey Alan Hopwood |
| Publisher | |
| Pages | 538 |
| Release | 1990 |
| Genre | Cyclotron resonance |
| ISBN |
Download Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching Book in PDF, Epub and Kindle
Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition
| Title | Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition PDF eBook |
| Author | Jie Zhang |
| Publisher | |
| Pages | 606 |
| Release | 1993 |
| Genre | Diamonds |
| ISBN |
Download Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition Book in PDF, Epub and Kindle
An Investigation of Anisotropic Etching of Silicon in an Electron Cyclotron Resonance Plasma
| Title | An Investigation of Anisotropic Etching of Silicon in an Electron Cyclotron Resonance Plasma PDF eBook |
| Author | Brian David Musson |
| Publisher | |
| Pages | 200 |
| Release | 1991 |
| Genre | Anisotropy |
| ISBN |
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An Investigation of Methods of Evaluating Plasma Etch Damage on Silicon
| Title | An Investigation of Methods of Evaluating Plasma Etch Damage on Silicon PDF eBook |
| Author | Venkatesh P. Gopinath |
| Publisher | |
| Pages | 196 |
| Release | 1991 |
| Genre | Plasma etching |
| ISBN |
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The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source
| Title | The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source PDF eBook |
| Author | Mark Alan Perrin |
| Publisher | |
| Pages | 332 |
| Release | 1996 |
| Genre | Electromagnetic measurements |
| ISBN |
Download The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source Book in PDF, Epub and Kindle
Anisotropic Selective Etching of Polysilicon in a Microwave Electron Cyclotron Resonance Plasma
| Title | Anisotropic Selective Etching of Polysilicon in a Microwave Electron Cyclotron Resonance Plasma PDF eBook |
| Author | Prashant K. Gadgil |
| Publisher | |
| Pages | 138 |
| Release | 1991 |
| Genre | |
| ISBN |
Download Anisotropic Selective Etching of Polysilicon in a Microwave Electron Cyclotron Resonance Plasma Book in PDF, Epub and Kindle
Microwave Plasma-assisted CVD Polycrystalline Diamond Films Deposition at Higher Pressure Conditions
| Title | Microwave Plasma-assisted CVD Polycrystalline Diamond Films Deposition at Higher Pressure Conditions PDF eBook |
| Author | Stanley Shengxi Zuo |
| Publisher | |
| Pages | 670 |
| Release | 2009 |
| Genre | Chemical vapor deposition |
| ISBN |
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