Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching

Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching
Title Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching PDF eBook
Author Jeffrey Alan Hopwood
Publisher
Pages 538
Release 1990
Genre Cyclotron resonance
ISBN

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Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition

Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition
Title Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition PDF eBook
Author Jie Zhang
Publisher
Pages 606
Release 1993
Genre Diamonds
ISBN

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The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source

The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source
Title The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source PDF eBook
Author Mark Alan Perrin
Publisher
Pages 332
Release 1996
Genre Electromagnetic measurements
ISBN

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An Investigation of Methods of Evaluating Plasma Etch Damage on Silicon

An Investigation of Methods of Evaluating Plasma Etch Damage on Silicon
Title An Investigation of Methods of Evaluating Plasma Etch Damage on Silicon PDF eBook
Author Venkatesh P. Gopinath
Publisher
Pages 196
Release 1991
Genre Plasma etching
ISBN

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Microwave Plasma-assisted CVD Polycrystalline Diamond Films Deposition at Higher Pressure Conditions

Microwave Plasma-assisted CVD Polycrystalline Diamond Films Deposition at Higher Pressure Conditions
Title Microwave Plasma-assisted CVD Polycrystalline Diamond Films Deposition at Higher Pressure Conditions PDF eBook
Author Stanley Shengxi Zuo
Publisher
Pages 670
Release 2009
Genre Chemical vapor deposition
ISBN

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Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source

Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source
Title Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source PDF eBook
Author Fan Cheung Sze
Publisher
Pages 574
Release 1993
Genre Cyclotron resonance
ISBN

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IAF92-0561 - IAF92-0620

IAF92-0561 - IAF92-0620
Title IAF92-0561 - IAF92-0620 PDF eBook
Author
Publisher
Pages 616
Release 1992
Genre Astronautics
ISBN

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