Atmospheric Pressure Chemical Vapor Deposition of Titanium Nitride
Title | Atmospheric Pressure Chemical Vapor Deposition of Titanium Nitride PDF eBook |
Author | Joshua N. Musher |
Publisher | |
Pages | 308 |
Release | 1994 |
Genre | Chemical vapor deposition |
ISBN |
Design and Implementation of a Low Pressure Chemical Vapor Deposition System for Polysilicon and Silicon Nitride
Title | Design and Implementation of a Low Pressure Chemical Vapor Deposition System for Polysilicon and Silicon Nitride PDF eBook |
Author | Jianwen Zhu |
Publisher | |
Pages | 172 |
Release | 1992 |
Genre | Dielectric films |
ISBN |
Low Pressure Chemical Vapor Deposition of Titanium Silicide
Title | Low Pressure Chemical Vapor Deposition of Titanium Silicide PDF eBook |
Author | Vida Ilderem |
Publisher | |
Pages | 202 |
Release | 1985 |
Genre | |
ISBN |
Handbook of Chemical Vapor Deposition
Title | Handbook of Chemical Vapor Deposition PDF eBook |
Author | Hugh O. Pierson |
Publisher | William Andrew |
Pages | 459 |
Release | 2012-12-02 |
Genre | Technology & Engineering |
ISBN | 1437744885 |
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors. This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.
Setup of Low Pressure Chemical Vapor Deposition of Boron Nitride Thin Films
Title | Setup of Low Pressure Chemical Vapor Deposition of Boron Nitride Thin Films PDF eBook |
Author | Hsiao C. Liu |
Publisher | |
Pages | 36 |
Release | 1991 |
Genre | |
ISBN |
Low-pressure Chemical Vapor Deposition of Silicon Nitride
Title | Low-pressure Chemical Vapor Deposition of Silicon Nitride PDF eBook |
Author | David L. Pearson |
Publisher | |
Pages | 122 |
Release | 1977 |
Genre | |
ISBN |
A Low Pressure Chemical Vapor Deposition Process for Titanium Disilicide Films with and Without Plasma Enhancement
Title | A Low Pressure Chemical Vapor Deposition Process for Titanium Disilicide Films with and Without Plasma Enhancement PDF eBook |
Author | Jaegab Lee |
Publisher | |
Pages | 270 |
Release | 1991 |
Genre | |
ISBN |