Integration of Functional Oxides with Silicon
Title | Integration of Functional Oxides with Silicon PDF eBook |
Author | Zhe Wang |
Publisher | |
Pages | 316 |
Release | 2018 |
Genre | |
ISBN |
Integration of Functional Oxides with Semiconductors
Title | Integration of Functional Oxides with Semiconductors PDF eBook |
Author | Alexander A. Demkov |
Publisher | Springer Science & Business Media |
Pages | 284 |
Release | 2014-02-20 |
Genre | Technology & Engineering |
ISBN | 146149320X |
This book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing.
Integration of Functional Oxides Onto Silicon Substrates
Title | Integration of Functional Oxides Onto Silicon Substrates PDF eBook |
Author | Hanu K. Arava |
Publisher | |
Pages | 134 |
Release | 2014 |
Genre | Microelectronics |
ISBN |
The purpose of this thesis is to investigate the integration of functional oxides onto silicon substrates using MBE and Spin-Coating techniques. Functionality is defined, by Materials Department of Imperial College of London, as any property in a material that is not load-bearing in nature. Examples of functionalities that are not load-bearing include magnetic, electric, electro-optic, pyroelectric and many more unique types of behavior. More-than-Moore is the primary motivation within the thesis. Unlike the standard Moore's Law predicting the doubling of semiconductor devices onto a single microchip, More-than-Moore looks into increasing functionality in a single microchip.
Integration of Functional Oxide Thin Film Heterostructures with Silicon (100) Substrates
Title | Integration of Functional Oxide Thin Film Heterostructures with Silicon (100) Substrates PDF eBook |
Author | Ravi Aggarwal |
Publisher | |
Pages | 122 |
Release | 2010 |
Genre | |
ISBN |
Functional Oxides
Title | Functional Oxides PDF eBook |
Author | Duncan W. Bruce |
Publisher | John Wiley & Sons |
Pages | 413 |
Release | 2011-03-29 |
Genre | Technology & Engineering |
ISBN | 1119972949 |
Functional oxides have a wide variety of applications in the electronic industry. The discovery of new metal oxides with interesting and useful properties continues to drive much research in chemistry, physics, and materials science. In Functional Oxides five topical areas have been selected to illustrate the importance of metal oxides in modern materials chemistry: Noncentrosymmetric Inorganic Oxide Materials Geometrically Frustrated Magnetic Materials Lithium Ion Conduction in Oxides Thermoelectric Oxides Transition Metal Oxides - Magnetoresistance and Half-Metallicity The contents highlight structural chemistry, magnetic and electronic properties, ionic conduction and other emerging areas of importance, such as thermoelectricity and spintronics. Functional Oxides covers these complex concepts in a clear and accessible manner providing an excellent introduction to this broad subject area.
Epitaxy of Crystalline Oxides for Functional Materials Integration on Silicon
Title | Epitaxy of Crystalline Oxides for Functional Materials Integration on Silicon PDF eBook |
Author | Gang Niu |
Publisher | |
Pages | 231 |
Release | 2010 |
Genre | |
ISBN |
Oxides form a class of material which covers almost all the spectra of functionalities : dielectricity, semiconductivity, metallicity superconductivity, non-linear optics, acoustics, piezoelectricity, ferroelectricity, ferromagnetism...In this thesis, crystalline oxides have beenintegrated on the workhorse of the semiconductor industry, the silicon, by Molecular Beam Epitaxy (MBE).The first great interest of the epitaxial growth of crystalline oxides on silicon consists in the application of "high-k" dielectric for future sub-22nm CMOS technology. Gadoliniumoxide was explored in detail as a promising candidate of the alternative of SiO2. The pseudomorphic epitaxial growth of Gd2O3 on Si (111) was realized by identifying the optimal growth conditions. The Gd2O3 films show good dielectric properties and particularly an EOTof 0.73nm with a leakage current consistent with the requirements of ITRS for the sub-22nmnodes. In addition, the dielectric behavior of Gd2O3 thin films was further improved by performing PDA treatments. The second research interest on crystalline oxide/Si platform results from its potential application for the "More than Moore" and "Heterogeneous integration" technologies. TheSrTiO3/Si (001) was intensively studied as a paradigm of the integration of oxides on semiconductors. The crystallinity, interface and surface qualities and relaxation process of the STO films on silicon grown at the optimal conditions were investigated and analyzed. Several optimized growth processes were carried out and compared. Finally a "substrate-like" STO thin film was obtained on the silicon substrate with good crystallinity and atomic flat surface. Based on the Gd2O3/Si and SrTiO3/Si templates, diverse functionalities were integrated on the silicon substrate, such as ferro-(piezo-)electricity (BaTiO3, PZT and PMN-PT),ferromagnetism (LSMO) and optoelectronics (Ge). These functional materials epitaxially grown on Si can be widely used for storage memories, lasers and solar cells, etc.
Molecular Beam Epitaxy
Title | Molecular Beam Epitaxy PDF eBook |
Author | Mohamed Henini |
Publisher | Elsevier |
Pages | 790 |
Release | 2018-06-27 |
Genre | Science |
ISBN | 0128121378 |
Molecular Beam Epitaxy (MBE): From Research to Mass Production, Second Edition, provides a comprehensive overview of the latest MBE research and applications in epitaxial growth, along with a detailed discussion and 'how to' on processing molecular or atomic beams that occur on the surface of a heated crystalline substrate in a vacuum. The techniques addressed in the book can be deployed wherever precise thin-film devices with enhanced and unique properties for computing, optics or photonics are required. It includes new semiconductor materials, new device structures that are commercially available, and many that are at the advanced research stage. This second edition covers the advances made by MBE, both in research and in the mass production of electronic and optoelectronic devices. Enhancements include new chapters on MBE growth of 2D materials, Si-Ge materials, AIN and GaN materials, and hybrid ferromagnet and semiconductor structures. - Condenses the fundamental science of MBE into a modern reference, speeding up literature review - Discusses new materials, novel applications and new device structures, grounding current commercial applications with modern understanding in industry and research - Includes coverage of MBE as mass production epitaxial technology and how it enhances processing efficiency and throughput for the semiconductor industry and nanostructured semiconductor materials research community