Handbook of Critical Dimension Metrology and Process Control
Title | Handbook of Critical Dimension Metrology and Process Control PDF eBook |
Author | Kevin M. Monahan |
Publisher | SPIE-International Society for Optical Engineering |
Pages | 376 |
Release | 1994 |
Genre | Electronic industries |
ISBN |
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Handbook of Silicon Semiconductor Metrology
Title | Handbook of Silicon Semiconductor Metrology PDF eBook |
Author | Alain C. Diebold |
Publisher | CRC Press |
Pages | 703 |
Release | 2001-06-29 |
Genre | Technology & Engineering |
ISBN | 0203904540 |
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
National Semiconductor Metrology Program
Title | National Semiconductor Metrology Program PDF eBook |
Author | National Institute of Standards and Technology (U.S.) |
Publisher | |
Pages | 160 |
Release | 2000 |
Genre | Semiconductors |
ISBN |
Integrated Circuit Metrology, Inspection, and Process Control
Title | Integrated Circuit Metrology, Inspection, and Process Control PDF eBook |
Author | Kevin M. Monahan |
Publisher | |
Pages | 340 |
Release | 1987 |
Genre | Technology & Engineering |
ISBN |
National Semiconductor Metrology Program
Title | National Semiconductor Metrology Program PDF eBook |
Author | National Semiconductor Metrology Program (U.S.) |
Publisher | |
Pages | 82 |
Release | |
Genre | Semiconductors |
ISBN |
National Semiconductor Metrology Program, Semiconductor Electronics Division, NIST List Of Publications, LP 103, March 1999
Title | National Semiconductor Metrology Program, Semiconductor Electronics Division, NIST List Of Publications, LP 103, March 1999 PDF eBook |
Author | |
Publisher | |
Pages | 148 |
Release | 1999 |
Genre | |
ISBN |
Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Title | Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography PDF eBook |
Author | P. Rai-Choudhury |
Publisher | IET |
Pages | 784 |
Release | 1997 |
Genre | Technology & Engineering |
ISBN | 9780852969069 |
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.