Electron Optical Studies of Heteroepitaxial Growth of Beta Silicon Carbide Layers Through Molten Metal Intermediates
Title | Electron Optical Studies of Heteroepitaxial Growth of Beta Silicon Carbide Layers Through Molten Metal Intermediates PDF eBook |
Author | Joseph J. Comer |
Publisher | |
Pages | 30 |
Release | 1970 |
Genre | Epitaxy |
ISBN |
Beta silicon carbide has the potential of becoming an important semiconductor device material for hazardous military environments such as high temperature and radiation. This report is concerned with a study of the growth of thin single crystal films of beta silicon carbide through molten metal intermediates. Thin films of nickel, cobalt, chromium and iron were deposited by vacuum deposition on to the (0001) faces of single crystals of alpha silicon carbide. Then heteroepitaxial layers of beta silicon carbide were deposited through the molten metal films by the hydrogen reduction of methyltrichlorosilane. The deposited films were studied by electron microscopy, electron diffraction and electron beam microprobe analysis to determine the growth mechanism and to arrive at optimum conditions for heteroepitaxial growth. From the results obtained it was concluded that nickel and cobalt were equally effective in promoting epitaxial growth. Films of nickel only 20A in thickness were as effective as those up to 300A. Results with chromium and iron were disappointing for different reasons. Chromium did not etch the substrate surface uniformly because of poor wetting. With iron, whisker growth of beta silicon carbide occurred at the surface. Although in many respects the growth of mechanism resembled that of the vapor-liquid-solid method, certain differences were observed which make the actual growth mechanism using nickel and cobalt films still uncertain. (Author).
Scientific and Technical Aerospace Reports
Title | Scientific and Technical Aerospace Reports PDF eBook |
Author | |
Publisher | |
Pages | 832 |
Release | 1970 |
Genre | Aeronautics |
ISBN |
Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Bibliography, with Abstracts, of AFCRL Publications from 1 April to 30 June 1970
Title | Bibliography, with Abstracts, of AFCRL Publications from 1 April to 30 June 1970 PDF eBook |
Author | Air Force Cambridge Research Laboratories (U.S.) |
Publisher | |
Pages | 268 |
Release | 1970 |
Genre | Geophysics |
ISBN |
This bibliography lists all AFCRL in-house reports, journal articles, and contractor reports issued from 1 April to 30 June 1970. Abstracts are included.
Report on Research at AFCRL
Title | Report on Research at AFCRL PDF eBook |
Author | Air Force Cambridge Research Laboratories (U.S.) |
Publisher | |
Pages | 400 |
Release | 1970 |
Genre | Geophysics |
ISBN |
U.S. Government Research and Development Reports
Title | U.S. Government Research and Development Reports PDF eBook |
Author | |
Publisher | |
Pages | 1214 |
Release | 1970 |
Genre | Science |
ISBN |
Silicon Carbide
Title | Silicon Carbide PDF eBook |
Author | Wolfgang J. Choyke |
Publisher | Springer Science & Business Media |
Pages | 911 |
Release | 2013-04-17 |
Genre | Technology & Engineering |
ISBN | 3642188702 |
Since the 1997 publication of "Silicon Carbide - A Review of Fundamental Questions and Applications to Current Device Technology" edited by Choyke, et al., there has been impressive progress in both the fundamental and developmental aspects of the SiC field. So there is a growing need to update the scientific community on the important events in research and development since then. The editors have again gathered an outstanding team of the world's leading SiC researchers and design engineers to write on the most recent developments in SiC.
U.S. Government Research and Development Reports Index
Title | U.S. Government Research and Development Reports Index PDF eBook |
Author | |
Publisher | |
Pages | 752 |
Release | 1970 |
Genre | Government publications |
ISBN |