Electrochemical Processing in ULSI Fabrication and Semiconductor/metal Deposition II
Title | Electrochemical Processing in ULSI Fabrication and Semiconductor/metal Deposition II PDF eBook |
Author | Panayotis C. Andricacos |
Publisher | The Electrochemical Society |
Pages | 418 |
Release | 1999 |
Genre | Science |
ISBN | 9781566772310 |
Morphological Evolution of Electrodeposits and Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV
Title | Morphological Evolution of Electrodeposits and Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV PDF eBook |
Author | Kazuo Kondo |
Publisher | The Electrochemical Society |
Pages | 422 |
Release | 2005 |
Genre | Copper plating |
ISBN |
Papers in this volume are from the 199th ECS Meeting, held in Washington, DC, Spring 2001. Morphology evolution encompasses electrochemical processing in ULSI fabrication, shape evolution, growth habit, and microstructure of electrodeposits. The most prominent example at present is the electrochemical deposition of copper for ULSI interconnects. Many other electrochemical processes at various stages of emergence and development hold promise for the electronics industry and beyond.
Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV
Title | Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV PDF eBook |
Author | Electrochemical Society |
Publisher | |
Pages | 406 |
Release | 2005 |
Genre | |
ISBN |
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I
Title | Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I PDF eBook |
Author | Electrochemical Society. Dielectric Science and Technology Division |
Publisher | |
Pages | 290 |
Release | 1999 |
Genre | Science |
ISBN |
Electrochemical Processing in ULSI Fabrication III
Title | Electrochemical Processing in ULSI Fabrication III PDF eBook |
Author | Panayotis C. Andricacos |
Publisher | The Electrochemical Society |
Pages | 262 |
Release | 2002 |
Genre | Computers |
ISBN | 9781566772730 |
"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
Electrochemical Processing in ULSI Fabrication and Semiconductor/metal Deposition
Title | Electrochemical Processing in ULSI Fabrication and Semiconductor/metal Deposition PDF eBook |
Author | |
Publisher | |
Pages | 0 |
Release | 1999 |
Genre | |
ISBN | 9781566772310 |
Electrochemical Processing in ULSI and MEMS 4
Title | Electrochemical Processing in ULSI and MEMS 4 PDF eBook |
Author | T. P. Moffat |
Publisher | The Electrochemical Society |
Pages | 125 |
Release | 2009-10 |
Genre | Science |
ISBN | 1566777666 |
The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Electrochemical Processing in ULSI and MEMS 4¿, held during the 215th meeting of The Electrochemical Society, in San Francisco, CA from May 24 to 29, 2009.