Electrochemical Processing in ULSI and MEMS 3

Electrochemical Processing in ULSI and MEMS 3
Title Electrochemical Processing in ULSI and MEMS 3 PDF eBook
Author John O. Dukovic
Publisher The Electrochemical Society
Pages 288
Release 2007-09
Genre Science
ISBN 1566775868

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The papers in this issue describe the latest advances in fundamental and practical aspects of electrochemical processes for fabrication of microelectronic devices and related structures. Topics range from plating to etching, chips to packages, mechanisms to models, through-silicon vias to nanotubes, tin to ruthenium, capping to cooling, porous gold to porous alumina, probe-card springs to solder balls, electroless deposition to CMP, TFT-LCDs to magnetic nanowires and beyond.

Electrochemical Processing in ULSI and MEMS 4

Electrochemical Processing in ULSI and MEMS 4
Title Electrochemical Processing in ULSI and MEMS 4 PDF eBook
Author T. P. Moffat
Publisher The Electrochemical Society
Pages 125
Release 2009-10
Genre Science
ISBN 1566777666

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The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Electrochemical Processing in ULSI and MEMS 4¿, held during the 215th meeting of The Electrochemical Society, in San Francisco, CA from May 24 to 29, 2009.

Electrochemical Processes in ULSI and MEMS

Electrochemical Processes in ULSI and MEMS
Title Electrochemical Processes in ULSI and MEMS PDF eBook
Author Hariklia Deligianni
Publisher The Electrochemical Society
Pages 494
Release 2005
Genre Computers
ISBN 9781566774727

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Electrochemical Processing in ULSI and MEMS 2

Electrochemical Processing in ULSI and MEMS 2
Title Electrochemical Processing in ULSI and MEMS 2 PDF eBook
Author
Publisher
Pages 445
Release 2007
Genre Electrochemistry, Industrial
ISBN

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Electrochemical Processing in ULSI Fabrication III

Electrochemical Processing in ULSI Fabrication III
Title Electrochemical Processing in ULSI Fabrication III PDF eBook
Author Panayotis C. Andricacos
Publisher The Electrochemical Society
Pages 262
Release 2002
Genre Computers
ISBN 9781566772730

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"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.

Electrochemical Processing in ULSI and MEMS 4

Electrochemical Processing in ULSI and MEMS 4
Title Electrochemical Processing in ULSI and MEMS 4 PDF eBook
Author T. P. Moffat
Publisher
Pages 115
Release 2009
Genre
ISBN 9781607681168

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Electrochemical Processing in ULSI Fabrication III

Electrochemical Processing in ULSI Fabrication III
Title Electrochemical Processing in ULSI Fabrication III PDF eBook
Author Panayotis C. Andricacos
Publisher The Electrochemical Society
Pages 274
Release 2002
Genre Computers
ISBN

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"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.