Electrochemical Processing in ULSI and MEMS 3
Title | Electrochemical Processing in ULSI and MEMS 3 PDF eBook |
Author | John O. Dukovic |
Publisher | The Electrochemical Society |
Pages | 288 |
Release | 2007-09 |
Genre | Science |
ISBN | 1566775868 |
The papers in this issue describe the latest advances in fundamental and practical aspects of electrochemical processes for fabrication of microelectronic devices and related structures. Topics range from plating to etching, chips to packages, mechanisms to models, through-silicon vias to nanotubes, tin to ruthenium, capping to cooling, porous gold to porous alumina, probe-card springs to solder balls, electroless deposition to CMP, TFT-LCDs to magnetic nanowires and beyond.
Electrochemical Processing in ULSI and MEMS 4
Title | Electrochemical Processing in ULSI and MEMS 4 PDF eBook |
Author | T. P. Moffat |
Publisher | The Electrochemical Society |
Pages | 125 |
Release | 2009-10 |
Genre | Science |
ISBN | 1566777666 |
The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Electrochemical Processing in ULSI and MEMS 4¿, held during the 215th meeting of The Electrochemical Society, in San Francisco, CA from May 24 to 29, 2009.
Electrochemical Processes in ULSI and MEMS
Title | Electrochemical Processes in ULSI and MEMS PDF eBook |
Author | Hariklia Deligianni |
Publisher | The Electrochemical Society |
Pages | 494 |
Release | 2005 |
Genre | Computers |
ISBN | 9781566774727 |
Electrochemical Processing in ULSI and MEMS 2
Title | Electrochemical Processing in ULSI and MEMS 2 PDF eBook |
Author | |
Publisher | |
Pages | 445 |
Release | 2007 |
Genre | Electrochemistry, Industrial |
ISBN |
Electrochemical Processing in ULSI Fabrication III
Title | Electrochemical Processing in ULSI Fabrication III PDF eBook |
Author | Panayotis C. Andricacos |
Publisher | The Electrochemical Society |
Pages | 262 |
Release | 2002 |
Genre | Computers |
ISBN | 9781566772730 |
"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
Electrochemical Processing in ULSI and MEMS 4
Title | Electrochemical Processing in ULSI and MEMS 4 PDF eBook |
Author | T. P. Moffat |
Publisher | |
Pages | 115 |
Release | 2009 |
Genre | |
ISBN | 9781607681168 |
Electrochemical Processing in ULSI Fabrication III
Title | Electrochemical Processing in ULSI Fabrication III PDF eBook |
Author | Panayotis C. Andricacos |
Publisher | The Electrochemical Society |
Pages | 274 |
Release | 2002 |
Genre | Computers |
ISBN |
"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.